多层压电驱动器在光刻机中的应用  

Application of Multilayer Piezoelectric Actuator in Lithography Scanners

作　　者：杜刚 康晓旭[4] 曾江涛 曾涛[1,2,3] Du Gang;Kang Xiaoxu;Zeng Jiangtao;Zeng Tao(Research Center of Piezoelectric Materials and Devices,Shanghai Research Institute of Materials,Shanghai 200437,China;Shanghai Engineering Research Center of Electronic Circuit Intelligent Protection,Shanghai 201202,China;Shanghai Key Laboratory of Engineering Materials Application and Evaluation,Shanghai Research Institute of Materials,Shanghai 200437,China;Shanghai Integrated Circuit R&D Center Co.,Ltd.,Shanghai 201210,China)

机构地区：[1]上海材料研究所压电材料及器件研究中心,上海200437 [2]上海电子线路智能保护工程技术研究中心,上海201202 [3]上海材料研究所上海市工程材料应用与评价重点实验室,上海200437 [4]上海集成电路研发中心有限公司,上海201210

出　　处：《激光与光电子学进展》2022年第9期393-402,共10页Laser & Optoelectronics Progress

基　　金：上海市国际合作项目(20520730600)。

摘　　要：多层压电驱动器具有体积小、响应快、刚度大、位移精度高、驱动力大等优点,在光刻机的开发中有广泛的应用。简要介绍了多层压电驱动器的基本结构与特征,列举了多层压电驱动器在光刻机投影物镜的高精度微调、掩模台的定位及光刻机的主动减振等方面的典型应用。最后,对多层压电驱动器的发展方向进行了展望。Multilayer piezoelectric actuator has the advantages of small volume,fast response,large stiffness,high displacement accuracy,and large driving force output,which is extensively utilized in the development of lithography scanners.This paper briefly introduces the basic structure and characteristics of multilayer piezoelectric actuator,and lists the typical applications of piezoelectric actuator in high-precision adjustment of projection lens of lithography scanners,positioning of reticle stage,and active vibration isolation of lithography scanners.Finally,the development direction of multilayer piezoelectric actuator is prospected.

关 键 词：多层压电驱动器 光刻机 投影物镜 主动减振 

分 类 号：O469[理学—凝聚态物理]