LTCC厚膜电阻尺寸效应研究  

Study on Size Effect of Thick Film Resistors on LTCC

作　　者：李建辉[1,2] 沐方清 吴建利[1,2] LI Jian-hui;MU Fang-qing;WU Jian-li(The 43rd Research Institute of CETC,Hefei 230088,China;Anhui Province Key Laboratory of Microsystem,Hefei 230088,China)

机构地区：[1]中国电子科技集团公司第四十三研究所,安徽合肥230088 [2]微系统安徽省重点实验室,安徽合肥230088

出　　处：《中国电子科学研究院学报》2022年第4期398-403,共6页Journal of China Academy of Electronics and Information Technology

摘　　要：厚膜电阻的阻值与膜层厚度密切相关。文中研究了低温共烧陶瓷(Low Temperature Cofired Ceramic,LTCC)厚膜电阻尺寸对印制电阻膜厚和阻值的影响。结果显示,用同一印刷网版、同一方阻标称值浆料印制电阻时,不同尺寸的电阻得到不同的膜厚和实际方阻值。电阻尺寸越小,所印制电阻越厚,电阻方阻越小;电阻尺寸越大,电阻方阻越大,但方阻增大趋势减慢。对电阻尺寸影响印制膜层厚度的原因进行了分析,电阻的端头电极和网版乳胶层对不同尺寸电阻的印制膜厚有不同的影响。对于不同尺寸的厚膜电阻,其干膜厚度与方阻的乘积为具有较小标准偏差的常数。The resistance of a thick film resistor is closely related to its film thickness. The influence of the size of LTCC printed thick film resistors on the film thickness and resistance is studied. The results show that when the resistors are printed with the same printing screen mask and the same nominal value paste, different size resistors have different film thicknesses and actual sheet resistance values. The smaller the resistor size is, the thicker the printed film is and the smaller the sheet resistance is;the larger the resistor size is, the larger the sheet resistance is, but the sheet resistance increases slowly in tendency. The reasons for the influence of the resistor size on the printed film thickness are analyzed. The film thickness is differently affected by resistor’s end electrodes and the emulsion layer of the screen mask for different resistor sizes. For thick film resistors of different sizes, the product of the dry film thickness and sheet resistance is a constant with a small standard deviation.

关 键 词：LTCC 印制 厚膜电阻 膜厚 方阻 电阻率 

分 类 号：TN452[电子电信—微电子学与固体电子学]