GC-AED在高纯磷烷特种气体杂质分析检测领域的研究应用  

Application of GC-AED for the Analysis of Impurities in High Purity Phosphine Gas

作　　者：朱颜 乔洋 陈化冰 黄呈熙 ZHU Yan;QIAO Yang;CHEN Huabing;HUANG Chengxi(Suzhou Nata Opto-electronic Material Co. , Ltd. , Suzhou 215028, China;Joint Analytical Systems Company, Newark 19713, Amercia)

机构地区：[1]苏州南大光电材料有限公司,江苏苏州215028 [2]JAS联合分析系统公司,美国特拉华纽瓦克19713

出　　处：《低温与特气》2022年第3期38-41,共4页Low Temperature and Specialty Gases

摘　　要：对GC-AED光谱分析检测技术在高纯特气分析检测领域做了应用研究,首次在国内实现高纯磷烷中锗烷杂质的分析检测,锗烷检出限低于0.5×10^(-9),为高迁移率电子器件及探测器外延应用提供有效指导。The application of GC-AED spectral analysis and detection technology in the field of high-purity special gas analysis and detection was studied.The detection limit of germane in high-purity phosphine was lower than 0.5×10^(-9) for the first time in China,which provides effective guidance for the epitaxial application of high mobility electronic devices and detectors.

关 键 词：GC-AED(色谱-原子发射光谱检测器) 磷烷 锗烷 砷烷 

分 类 号：TQ117[化学工程—无机化工]