全自动晶圆磨边机平面度误差测量与评定  

Measurement and Evaluation of Flatness Error in Automated Trimming Machine

作　　者：岑健明 CEN Jianming(Zhuhai Bojay Electronics Co.,Ltd,Zhuhai 519000,China)

机构地区：[1]珠海市博杰电子股份有限公司,广东珠海519000

出　　处：《电子工业专用设备》2022年第1期48-52,共5页Equipment for Electronic Products Manufacturing

摘　　要：提出了在全自动晶圆磨边设备中对晶圆平面度误差的等角度单圆周测量方案,讲述了最小二乘法的算法原理;并根据最小二乘法的算法原理,基于Matlab软件编写平面度误差评定及其结果的可视化程序;运行程序对全自动磨边机测量的数据进行处理,程序运行结果表明,该算法运行稳定可靠,能够快速确定最小二乘法平面方程和评定平面度误差。In this paper,the equal angle-single circle measurement strategy on the measurement of wafer’s flatness error in automated wafer trimming machine is presented,and the algorithm principle of least square method is described.And according to the algorithm principle of least square method,the program of evaluation and visualization of flatness error for circular plane is developed based on MATLAB software.Run the program to process the measured data of automated wafer trimming machine,the results show that the program runs stably and reliably,and it can determine the least square plane equation and evaluate the flatness error quickly.

关 键 词：平面度 晶圆 最小二乘 误差评定 

分 类 号：TN305.1[电子电信—物理电子学]