伺服运动控制工作台精度误差分析  

Accuracy Error Analysis of Servo Motion Control Workbench

作　　者：谭立杰[1] 闫芸 宋婉贞[1] TAN Lijie;YAN Yun;SONG Wanzhen(The 45^(th) Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,100176

出　　处：《电子工业专用设备》2022年第1期53-56,共4页Equipment for Electronic Products Manufacturing

摘　　要：以XY轴十字叠加伺服运动控制工作台为例,通过观测误差现象,从电气控制系统方面分析位置式数字PID控制器的精度误差产生原因,并提出减小误差的方法和验证方法。从工作台机械系统方面,分析精度误差产生原因,提出设计和选型标准。通过几方面的技术改进提高伺服运动控制工作台的定位精度、重复精度。This paper takes XY axis cross overlay servo motion control workbench as an example,through the observation of error phenomenon,from the aspect of the electrical control system,the causes of accuracy error of the position digital PID controller are analyzed,and the method to reduce the error and the verification method are put forward.From the mechanical system of the workbench,the causes of accuracy error are analyzed,and the design and selection standards are put forward.The positioning accuracy and repetition accuracy of servo motion control workbench are improved by technical improvements.

关 键 词：伺服控制 XY工作台 定位精度误差 重复精度误差 

分 类 号：TN305[电子电信—物理电子学]