体声波谐振式日盲紫外光传感器研究  

Investigation on Bulk Acoustic Wave Resonant Solar Blind Ultraviolet Sensor

作　　者：王笑怡 林文魁[2,3] 李海鸥 云小凡[3,4] 曾春红 陈体威[2,3] 刘义彰 孙玉华 崔奇[2] 张宝顺 WANG Xiaoyi;LIN Wenkui;LI Haiou;YUN Xiaofan;ZENG Chunhong;CHEN Tiwei;LIU Yizhang;SUN Yuhua;CUI Qi;ZHANG Baoshun(Guangxi Key Lab.of Precision Navigation Technol.and Application,Guilin University of Electronic Science and Technol.,Guilin 541004,CHN;Nanofabrication Platform,Suzhou Institute of Nanotechnol.and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,CHN;School of Nanotechnology and Nano-Bionics,University of Science and Technol.of China,Hefei 215123,CHN;School of Materials Science and Engin.,Nanjing University of Science and Technol.,Nanjing 210000,CHN)

机构地区：[1]桂林电子科技大学广西精密导航技术与应用重点实验室,广西桂林541004 [2]中国科学院苏州纳米技术与纳米仿生研究所纳米加工平台,江苏苏州215123 [3]中国科学技术大学纳米技术与纳米仿生学院,合肥215123 [4]南京理工大学材料科学与工程学院,南京210000

出　　处：《半导体光电》2022年第2期303-310,共8页Semiconductor Optoelectronics

基　　金：国家重点研发计划项目(2017YFA0305000)。

摘　　要：提出了一种并联体声波谐振器(BAWR)与Ga_(2)O_(3)基MSM紫外传感器的新型高灵敏度传感器结构,即体声波谐振式日盲紫外光传感器(BAWR-UV Sensor)。设计并制备了MSM Ga_(2)O_(3)紫外传感器和BAWR传感器,将实测的光、暗S参数在仿真软件中封装为S1P数据模型代替MSM等效电路,用MBVD模型代替BAWR等效电路,通过并联两种结构建立了BAWR-UV仿真模型;采用ADS软件仿真了BAWR核心参数对BAWR-UV传感器灵敏度的影响,研究了提高灵敏度的设计方案。仿真结果表明,在0.5~4.5 GHz频率范围内,BAWR-UV的并联Q值越大,阻抗灵敏度越高,同时阻抗灵敏度随频率降低而增大,在并联谐振频率f_(p)=0.533 GHz时获得最佳阻抗灵敏度为100 kΩ/(μW/mm^(2));频率灵敏度随频率的升高而增大,在f_(p)=4.5 GHz时获得最佳频率灵敏度为1.4 MHz/(μW/mm^(2))。最后,开展了高灵敏度日盲紫外传感器的探索。Proposed is a novel high-sensitivity sensor structure with a parallel bulk acoustic wave resonator(BAWR)and Ga_(2)O_(3)-based MSM UV sensor,namely the bulk acoustic wave resonance solar-blind UV sensor(BAWR-UV sensor).The MSM Ga_(2)O_(3)UV sensor and BAWR sensor were designed and fabricated.The measured light and dark S parameters were packaged in the simulation software as S1 P data model instead of MSM equivalent circuit,MBVD model was used instead of BAWR equivalent circuit,and the two structures were built in parallel to develop the BAWR-UV simulation model.The influence of the BAWR core parameters on the sensitivity of the BAWR-UV sensor was simulated by ADS software,and the design scheme to improve the sensitivity was studied.The simulation results show that in the frequency range of 0.5~4.5 GHz,the larger the Q;of BAWR-UV,the higher the impedance sensitivity,and the impedance sensitivity increases with the decrease of frequency,and the optimal impedance sensitivity is 100 kΩ/(μW/mm^(2))when f_(p)=0.533 GHz;the frequency sensitivity increases with the increase of frequency,and the best frequency sensitivity is 1.4 MHz/(μW/mm^(2))when f_(p)=4.5 GHz.And also the exploration of high-sensitivity solar-blind UV sensors was carried out.

关 键 词：日盲紫外探测器 体声波谐振器 氧化镓 叉指传感器 

分 类 号：TN23[电子电信—物理电子学]