检测电极变形对MEMS陀螺仪振动性能的影响  

The Effect of Sensing Electrode’s Deformation on MEMS Gyroscope’s Vibration Performance

作　　者：徐淑静[1] 卢新艳[1] XU Shujing;LU Xinyan(The 13th Research Institute of China Electronics Technology Group Corporation,Shijiazhuang Hebei 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《传感技术学报》2022年第6期732-737,共6页Chinese Journal of Sensors and Actuators

摘　　要：MEMS陀螺仪的振动环境性能是制约其应用的重要指标。针对MEMS音叉式陀螺仪,分析了检测电极在驱动运动作用下的变形对陀螺仪振动性能产生影响的机理。建立了振动环境中包含检测电极变形在内的误差信号模型,将误差信号的频率成分与角速率响应信号进行了对比分析。通过对检测质量的受力状态进行优化,降低了检测电极变形的有效值,将振动误差信号的幅度从25 dB降低到9 dB以下,大幅提升了MEMS陀螺仪的振动环境适应性。The performance of MEMS gyroscope under vibration environment is an essential specification for its applications.For MEMS tuning fork gyroscope,the mechanism of how the vibration performance is affected by the deformation of sensing electrodes caused by driving motion is studied.The error signal model including the deformation of sensing electrodes in vibration environment is established,and the frequency components of the error signals are compared with the response signals caused by angular rate.The equivalent values of the deformation of sensing electrodes due to driving motion are significantly recuced by optimizing the sensing structure.In consequence,the amplitude of vibration induced error signal is decreased from 25 dB to less than 9 dB,which remarkably improves the vibration performance of MEMS gyroscope.

关 键 词：MEMS陀螺仪 振动性能 误差信号分析 音叉结构 静电驱动 

分 类 号：TN403[电子电信—微电子学与固体电子学] TP212[自动化与计算机技术—检测技术与自动化装置]