10^(-9)~10^(-1)Pa宽量程电离真空计研制与性能研究  

Development and Performance Study of 10^(-9)~10^(-1)Pa Wide-range Ionization Gauge

作　　者：张虎忠[1] 葛金国 姚鹏 魏建平 成永军[1] 孙雯君[1] 习振华[1] 马卓娅 马亚芳[1] 李得天[1] ZHANG Huzhong;GE Jinguo;YAO Peng;WEI Jianping;CHENG Yongjun;SUN Wenjun;XI Zhenhua;MA Zhuoya;MAYafang;LI Detian(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2022年第4期392-396,共5页Vacuum and Cryogenics

基　　金：国家自然科学基金(62171208)。

摘　　要：热阴极电离真空计的压力测量范围可覆盖超高真空、高真空和中低真空,该真空计广泛应用于各类真空装备。依据电离真空计工作原理,对电离真空计的本底干扰离子流I_(r)^(+)进行了理论分析,讨论了气体分子热脱附、软X射线效应、ESD效应等多个因素对I_(r)^(+)的影响,优化了规管尺寸和制备工艺,研制了真空规管,将本底干扰降低到2×10^(-9)Pa以下,并研制了配套的电控单元,使微弱离子流测量下限达到0.1 pA量级。该宽量程电离真空计产品的实测范围达到1.26×10^(-9)~6.02×10^(-1)Pa,灵敏度波动小于±11%。The measurement range of the hot cathode ionization gauge covers the pressure up to ultra-high vacuum.It is widely used in variety of vacuum facilities.According to the principle of ionization gauge,the residual ion current I_(r)^(+) of ionization gauge is theoretically analyzed.Several effects,such as gas molecular thermal desorption,soft X-ray and electron stimulated desorption,are discussed.The gauge structure and preparation process were optimized,and the vacuum gauge was developed.The residual pressure is reduced lower than 2×10^(-9)Pa.A supporting electronic controller has been developed and built,and the lower limit of the low current measurement reaches 0.1 pA.The range of the ionization vacuum gauge varies from 1.26×10^(-9)~6.02×10^(-1)Pa,and the sensitivity fluctuation is less than±11%.

关 键 词：超高真空 真空测量 电离真空计 宽量程 灵敏度 

分 类 号：TB772.3[一般工业技术—真空技术]