用于高真空测量的MEMS谐振式真空计研制及性能研究  

Development and Performance Study of MEMS Resonant Gauge for High Vacuum Measurement

作　　者：王呈祥 侯占强[1] 肖定邦[1] 吴学忠[1] WANG Chengxiang;HOU Zhanqiang;XIAO Dingbang;WU Xuezhong(School of intelligent science,National University of Defense Technology,Hunan MEMS Research Center,Changsha 410073,China)

机构地区：[1]国防科技大学智能科学学院湖南省MEMS工程技术中心,长沙410073

出　　处：《真空与低温》2022年第4期425-431,共7页Vacuum and Cryogenics

基　　金：国家重点研发计划项目(2018YFB2002300)。

摘　　要：为实现高真空测量仪表的小型化,研制了一种双质量块结构的MEMS谐振式真空计。真空计物理部分与专用ASIC电路集成,采用交流电压驱动、电容检测技术,通过监测输出电压变化反演压力值。简要介绍了真空计的测量原理,研究了真空计的交流驱动电压与输出电压、频率之间的关系,探索了合适的交流驱动电压,实现了10^(-4)~10^(-1) Pa区间的压力测量和优于1×10^(-6) Pa的测量分辨率。由于体积小,该真空计在微小真空腔体泄露阈值告警、气体泄漏监测等领域具有广阔的应用前景。This paper introduces a MEMS resonant vacuum sensor with double mass blocks for high vacuum gauge miniaturization.The gauge,integrated with ASIC circuit,uses the technical scheme of electrostatic drive and capacitance detection to invert the vacuum pressure into vibrating amplitudes variation.Measurement principle of the gauge is briefly introduced and the relationship between AC driving signal and output amplitude and frequency is studied.Measurement range of 10^(-4)~10^(-1) Pa has realized by using a appropriate AC signal,with a very high measurement resolution(better than 1×10^(-6) Pa).This gauge has a broad application prospect in the field of leak threshold alarm and leak monitoring of small vacuum cavity.

关 键 词：MEMS 谐振式 高真空测量 

分 类 号：TB772[一般工业技术—真空技术]