基于PD反馈控制的音圈电机直驱式微动台直线度补偿技术  

Straightness Compensation Technology of Voice Coil Motor Direct-Drive Micro-Motion Positioning Stage Based on PD Feedback Control

作　　者：李奇 LI Qi(Ji Hua Laboratory,Foshan 528200,China)

机构地区：[1]季华实验室,广东佛山528200

出　　处：《电机与控制应用》2022年第8期59-65,共7页Electric machines & control application

摘　　要：采用高频响、短行程型音圈电机驱动的微动台结构,设计挠性弹簧为系统提供足够的刚度,建立了喷墨打印扫描轴直线度误差补偿系统。分析了音圈电机直驱微动台的数学模型,研究了该类电机的伺服控制方法,提出了基于PD控制的位置闭环控制器,增强了系统的抗干扰能力。试验结果表明:该方法能够满足喷墨打印扫描轴直线度精度要求,具有较强的鲁棒性。The micro-motion positioning stage structure driven by high frequency response and short stroke voice coil motor is adopted,and the flexible spring is designed to provide sufficient stiffness for the system,and the straightness error compensation system of inkjet printing scanning axis is established.The mathematical model of voice coil motor direct-drive micro-motion positioning stage is analyzed,and the servo control method of this kind of motor is studied,and a position closed-loop controller based on PD control is proposed,which enhance the anti-interference ability of the system.The test results show that this method can meet the requirements of the straightness accuracy of the scanning axis of inkjet printing and has strong robustness.

关 键 词：音圈电机 微动台 位置闭环控制 直线度补偿 喷墨打印 

分 类 号：TH122[机械工程—机械设计及理论] TM359.4[电气工程—电机]