基于图像处理的扫描电子显微镜校准方法  

Calibration Method for Scanning Electron Microscope Based on Image Processing

作　　者：张晓东 赵琳[1] 李锁印[1] 韩志国[1] 许晓青[1] 吴爱华[1] ZHANG Xiaodong;ZHAO Lin;LI Suoyin;HAN Zhiguo;XU Xiaoqing;WU Aihua(The 13th Institute of CETC,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《测试技术学报》2022年第5期410-415,共6页Journal of Test and Measurement Technology

摘　　要：扫描电子显微镜是半导体器件关键尺寸测量的重要仪器.为提高扫描电子显微镜的测量准确度和校准效率,研制了一套标称值为100 nm~10μm的线间隔样板和标称值为2μm~10μm的格栅样板.此外,针对现有校准规范中测长示值误差、正交畸变和线性失真度等参数,提出了一种基于图像处理的扫描电子显微镜校准方法.实验研究表明:研制的线间隔样板和格栅样板质量参数高,能够覆盖扫描电子显微镜的测量范围,解决仪器溯源问题.基于图像处理的扫描电子显微镜校准方法,能够有效提高测量准确度和校准效率.Scanning electron microscope(SEM) is an important instrument for critical dimensional measurement of semiconductor devices. In order to improve the measurement accuracy and the calibration efficiency of SEM, a set of line spacing samples with a nominal value of 100 nm to 10 μm and lattice samples with a nominal value of 2 μm to 10 μm was developed. In addition, a calibration method for SEM based on image processing was proposed, aiming at the length measurement and indication error, orthogonal distortion and linear distortion in the existing calibration specification. The experimental research shows that the developed line interval template and lattice samples have high quality parameters, which can cover the measurement range of SEM and solve the problem of instrument traceability. The calibration method for SEM based on image processing can effectively improve the measurement accuracy and the calibration efficiency.

关 键 词：扫描电子显微镜 线间隔样板 格栅样板 图像处理 校准方法 

分 类 号：TH711[机械工程—测试计量技术及仪器]