甚长波碲镉汞红外焦平面探测器  

Very long wave HgCdTe infrared focal plane detector

作　　者：李雄军[1] 邹雷 赵鹏[1] 杨超伟[1] 熊伯俊 王向前[1] 张应旭 刘艳珍 李红福 赵榆松 张绍裕 李立华[1] LI Xiong-Jun;ZOU Lei;ZHAO Peng;YANG Chao-Wei;XIONG Bo-Jun;WANG Xiang-Qian;ZHANG Ying-Xu;LIU Yan-Zhen;LI Hong-Fu;ZHAO Yu-Song;ZHANG Shao-Yu;LI Li-Hua(Kunming Institute of Physics,Kunming 650223,China;63963 Unit of the Chinese People's Liberation Army,Beijing 100072,China)

机构地区：[1]昆明物理研究所,云南昆明650223 [2]中国人民解放军63963部队,北京100072

出　　处：《红外与毫米波学报》2022年第5期818-824,共7页Journal of Infrared and Millimeter Waves

基　　金：云南省科技人才与平台计划项目(202105AD160047)。

摘　　要：采用砷离子注入p-on-n平面结技术制备了77 K工作温度下截止波长分别为13.23μm和14.79μm、像元中心距为25μm的甚长波640×512探测器,并对其基本性能和暗电流进行了测试和分析。结果表明,对于截止波长为13.23μm的甚长波640×512(25μm),器件量子效率为55%,NETD平均值为21.5 mK,有效像元率为99.81%;对于截止波长为14.79μm的甚长波640×512(25μm),器件量子效率为45%,NETD平均值为34.6 mK,有效像元率为99.28%。这两个甚长波器件在液氮温度下的R_(0)A分别为19.8Ω·cm^(2)和1.56Ω·cm^(2),达到了“Rule07”经验表达式的预测值,器件噪声主要受散粒噪声限制,显示出了较好的器件性能。Very long wave 640×512 FPAs with 25μm pixel pitch and cutoff wavelength of 13.23μm,14.79μm respec-tively at 77 K were prepared by the arsenic ion implanted p-on-n planar junction technology.The basic performance and dark current of the FPAs are characterized and analyzed.The results show that the quantum efficiency of the VLWIR 640×512 FPAs withλ_(c)(77 K)=13.23μm is 55%,the average NETD is 21.5 mk,with an operability of 99.81%;The quantum efficiency of the VLWIR 640×512 FPAs withλ_(c)(77 K)=14.79μm is 45%,the average NETD is 34.6 mK,with an operability of 99.28%.The R_(0)A figures of merit at liquid nitrogen temperature are 19.8Ω·cm^(2) and 1.56Ω·cm^(2) respectively,which reaches the predicted value of the"rule07"heuristic law,and the device noise is mainly limited by current shot noise.The results show that the performances of FPAs are at the state of the art.

关 键 词：甚长波 p-on-n 碲镉汞 焦平面探测器 R0A 

分 类 号：TN215[电子电信—物理电子学]