基于潘宁放电的离子枪研发  

Development of an Ion Gun Based on Penning Discharge

作　　者：石晓倩 郭方准[1] 李敏 SHI Xiao-qian;GUO Fang-zhun;LI Min(School of Mechanical Engineering,Dalian Jiaotong University,Dalian 116028,China)

机构地区：[1]大连交通大学机械工程学院,辽宁大连116028

出　　处：《真空电子技术》2022年第5期100-104,共5页Vacuum Electronics

基　　金：辽宁省教育厅“攀登学者”项目

摘　　要：为对样品实现表面清洁、表面刻蚀或深度分析,设计制造了潘宁放电型离子枪。通过阳极筒和一对阴极在磁场的作用下实现原子的离子化,通过调节离子所处区域的电位确定离子能量,通过静电透镜来实现离子的加速和聚焦。调节静电透镜的尺寸和相对位置,可以使离子束在出口处被聚焦。阳极筒和阴极的选材需要满足超高真空使用又要避免溅射。通过理论计算和模拟离子束流的轨迹,确定了离子枪各主要组件的参数。经过测试,工作距离为80 mm和氩气的工作气压为1.3×10^(-2) Pa时,2.5 keV氩离子束的束斑直径为12 mm,束流值为33μA。该离子枪可实现表面原子精度构造。A Penning discharge ion gun is designed and fabricated to achieve sample surface cleaning,surface etching or deep analysis.The ionization of molecules is realized by anode tube and a pair of cathodes under the action of magnetic field,the energy of ions is determined by regional potential,and the accelerating and focusing of ions are realized by electrostatic lenses.By adjusting the size and relative position of electrostatic lenses,the ion beam can be focused at the outlet.The materials of the anode tube and cathodes must be suitable for ultra-high vacuum and meanwhile can withstand ion sputtering.The main component parameters of the ion gun are determined by theoretical calculation and ion beam trajectory simulation.The test results show that with working distance of 80 mm and argon pressure of 1.3×10^(-2) Pa,the beam spot diameter of a 2.5 keV argon ion beam is 12 mm,and the beam current is 33μA.The developed ion gun enables the acquisition of atomic precision surface structures.

关 键 词：离子枪 潘宁放电 等离子体 表面科学 

分 类 号：TL99[核科学技术—核技术及应用]