溅射方式对氧化铌涂层微观结构与性能的影响  

Effect of Sputtering Mode on Microstructure and Properties of Niobium Oxide Coating

作　　者：王皓 丁子彧 袁乾鸿 潘旭 汤迎红[1] 丁泽良[1] WANG Hao;DING Ziyu;YUAN Qianhong;PAN Xu;TANG Yinghong;DING Zeliang(College of Mechanical Engineering,Hunan University of Technology,Zhuzhou Hunan 412007,China;College of Packaging and Materials Engineering,Hunan University of Technology,Zhuzhou Hunan 412007,China)

机构地区：[1]湖南工业大学机械工程学院,湖南株洲412007 [2]湖南工业大学包装与材料工程学院,湖南株洲412007

出　　处：《包装学报》2022年第5期28-35,共8页Packaging Journal

基　　金：湖南省自然科学基金资助项目(2020JJ6079);湖南省教育厅科学研究基金资助项目(20A159)。

摘　　要：分别采用射频溅射和射频反应溅射方式在AZ31镁合金表面制备了氧化铌涂层,并利用扫描电子显微镜、X射线衍射仪、X射线光电子能谱仪、多功能材料表面性能试验仪和电化学工作站对比研究了两种涂层的微观形貌、物相组成、附着力和耐腐蚀性能。研究结果表明,两种涂层都呈非晶柱状结构,铌的价态为Nb^(5+),对AZ31镁合金的腐蚀保护率达93%以上;与射频溅射沉积的氧化铌涂层相比,射频反应溅射沉积的氧化铌涂层的表面致密性和耐蚀性能更强,附着力提高约7.4倍。Niobium oxide coating was prepared on AZ31 magnesium alloy by RF sputtering and RF reactive sputtering.The microstructure,phase composition,chemical valence state,adhesion,and corrosion resistance of the coatings were studied by scanning electron microscope,X-ray diffractometer,X-ray photoelectron spectrometer,multifunctional material surface performance tester,and electrochemical workstation.The results show that both layers have an amorphous columnar structure,the niobium valence state of Nb^(5+),and excellent corrosion protection for AZ31 magnesium alloy up to 93%and above.Compared with RF sputtered niobium oxide coating,RF reactive sputtered niobium oxide coating has enhanced surface compactness,boosted corrosion resistance,and increased adhesion by about 7.4 times.

关 键 词：AZ31镁合金 射频溅射 反应溅射 氧化铌涂层 

分 类 号：TG174.4[金属学及工艺—金属表面处理]