预沉积ZnO薄膜对ZnO−MoS_(2)/ZnO复合涂层结构与性能影响  

Influence of Pre-deposition ZnO Thin Film on Structure and Properties of ZnO-MoS_(2)/ZnO Composite Coating

作　　者：曹明 赵岚 余健 唐平 许欢 钟珮瑶 CAO Ming;ZHAO Lan;YU Jian;TANG Ping;XU Huan;ZHONG Pei-yao(Jiangxi Province Engineering Research Center of Materials Surface Enhancing&Remanufacturing,Jiangxi Jiujiang 332005,China;School of Materials Science and Engineering,Jiujiang University,Jiangxi Jiujiang 332005,China;School of Pharmacy and Life Sciences,Jiujiang University,Jiangxi Jiujiang 332099,China)

机构地区：[1]江西省材料表面再制造工程技术研究中心,江西九江332005 [2]九江学院材料科学与工程学院,江西九江332005 [3]九江学院药学与生命科学学院,江西九江332099

出　　处：《表面技术》2022年第11期226-234,243,共10页Surface Technology

基　　金：江西省自然科学基金面上项目(20202BABL204004);江西省教育厅科技项目(CJJ190907)。

摘　　要：目的通过优化原子层沉积工艺获取不同厚度ZnO薄膜,研究ZnO薄膜晶体取向对ZnO−MoS_(2)涂层生长结构的影响,获得具有优异摩擦学性能的ZnO−MoS_(2)/ZnO复合涂层。方法采用原子层沉积法在不锈钢基体上预沉积不同厚度的ZnO薄膜,再用射频磁控溅射技术继续沉积ZnO−MoS_(2)涂层,制备ZnO−MoS_(2)/ZnO固体润滑复合涂层。结果X射线衍射分析发现,预沉积ZnO薄膜有诱导后续ZnO−MoS_(2)涂层沉积生长的作用,预沉积100 nm厚ZnO薄膜的ZnO−MoS_(2)/ZnO复合涂层显示出宽化的MoS_(2)(002)馒头峰,其截面形貌显示为致密的体型结构,获得的摩擦因数最低(0.08),纳米硬度最高(2.33 GPa),硬度/模量比显示该复合涂层的耐磨损性能得到提升;X射线光电子能谱分析结果表明,复合涂层表面游离S与空气中水发生反应程度大约为原子数分数5%,显示复合涂层耐湿性能较好;基于原子层沉积ZnO薄膜生长及其对后续ZnO−MoS_(2)涂层生长的影响分析,提出了ZnO−MoS_(2)/ZnO复合涂层磨损模型,阐明了ZnO薄膜对复合涂层结构及摩擦学性能的影响,并以该模型解释了200 nm厚ZnO薄膜上沉积ZnO−MoS_(2)涂层出现的摩擦因数由高到低的变化趋势及最终磨损失效现象。结论合适的原子层沉积制备的ZnO薄膜有利于MoS_(2)(002)取向生长,可有效提升ZnO−MoS_(2)/ZnO复合涂层的摩擦学性能;控制ZnO薄膜厚度,可实现ZnO薄膜与基底及ZnO−MoS_(2)层间界面之间的优化结合,以制得具有较好摩擦学性能及使用寿命的ZnO−MoS_(2)/ZnO复合涂层。Crystalline films produced by atomic layer deposition,high binding forces between the film and the substrate induced by chemical adsorption or chemical bonding on the substrate surface will affect the tribological properties of composite coatings.For optimized tribological properties of ZnO-MoS_(2)/ZnO composite coatings,ZnO thin layers of various thicknesses were first manufactured by atomic layer deposition.ZnO-MoS_(2) coatings were then deposited via radio frequency magnetron sputtering to obtain ZnO-MoS_(2)/ZnO composite solid lubrication coatings.The effects of pre-deposition ZnO thin films on the structure of the subsequent ZnO-MoS_(2) coatings and the tribological properties of the composite coatings were analyzed.The X-ray diffraction analysis indicates that the pre-deposited ZnO film may induce the deposition and growth of the subsequent ZnO-MoS_(2) coating.The composite coating with a ZnO film thickness of 100 nm has a wide MoS_(2)(002)peak.In the meantime,the cross-sectional morphology of the composite coating shows a more compact structure.The obtained composite coating has the lowest coefficient of friction(0.08)and the highest nano-hardness(2.33 GPa).H/E shows that the wear resistance of the composite coating is also improved.The results of X-ray photoelectron spectroscopy show that approximately 5 at.%free S on the surface of the composite coating under atmospheric conditions,indicating improved moisture resistance.Atomic layer deposition and radio frequency magnetron sputtering methods reveal that pre-deposited ZnO thin film has a strong effect on the structures of subsequent ZnO-MoS_(2) coatings,providing insights into the effect of ZnO in MoS_(2)-based solid lubrication coatings.According to the analysis of the growth of ZnO thin film and its influence on the growth of subsequent ZnO-MoS_(2) coating,a worn model for ZnO-MoS_(2)/ZnO composite coating was put forward.The schematic diagram assumed that factors of ZnO thin film-substrate bonding force,brittleness of ZnO thin film,and chemical adsorp

关 键 词：原子层沉积 ZNO薄膜 ZnO-MoS_(2)/ZnO复合涂层 晶化 润滑性能 

分 类 号：TG178[金属学及工艺—金属表面处理]