涡轮分子泵曲面叶片抽气特性研究  

Pumping Characteristics of Curved Blades of Turbomolecular Pump

作　　者：匡永麟 王晓冬[1] 张国玉 张鹏飞 杜志华 KUANG Yonglin;WANG Xiaodong;ZHANG Guoyu;ZHANG Pengfei;DU Zhihua(School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China)

机构地区：[1]东北大学机械工程与自动化学院,沈阳110819

出　　处：《真空科学与技术学报》2022年第10期731-736,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家重大科学仪器设备开发专项项目(2013YQ130429)。

摘　　要：涡轮分子泵广泛应用于半导体与薄膜工业、核物理及表面科学等领域,是获得超高真空环境的核心机械设备。本文从一体成型的涡轮转子的可加工性出发,提出了一种涡轮叶片的结构改进方案,并分别使用二维模型和三维模型对改进前后的结构进行性能评估:在相同几何结构下,二维模型计算单级涡轮叶列的何氏系数略高于三维模型,压缩比略低于三维模型。同时,改进模型在解决涡轮叶片叶根可加工性的同时,其最大何氏系数和最大压缩比均有一定程度的提升。Turbomolecular pump is widely used in the semiconductor and thin film industry,nuclear physics,and surface science.It is the core mechanical equipment to obtain an ultra-high vacuum environment.Based on the machinability of the integrally formed turbine rotor,this paper proposes a structural improvement scheme for the turbine blade and uses the two-dimensional model and the three-dimensional model to evaluate the performance of the improved structure:under the same geometric structure,the ho coefficient of the two-dimensional model is slightly higher than that of the three-dimensional model,and the compression ratio is slightly lower than that of the three-dimensional model.The improved model not only solves the machinability of the turbine blade root,but also improves its maximum ho coefficient and maximum compression ratio to a certain extent.

关 键 词：涡轮分子泵 曲面叶片 抽气性能 结构设计 数值计算 

分 类 号：TB752.27[一般工业技术—真空技术]