基于氟塑料的超洁净气动液体隔膜阀结构设计与制备  

Design and Preparation of Super Clean Pneumatic liquid Diaphragm Valve Structure Based on Fluoroplastic

作　　者：唐金鑫 杜亮 李培源 陈波[1] 李超波[1] TANG Jinxin;DU Liang;LI Peiyuan;CHEN Bo;LI Chaobo(Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China;Semiconductor Manufactory International Corporation(SMIC),Beijing 100176,China)

机构地区：[1]中国科学院微电子研究所,北京100029 [2]中芯国际集成电路制造(北京)有限公司,北京100176

出　　处：《电子工业专用设备》2022年第5期5-9,28,共6页Equipment for Electronic Products Manufacturing

摘　　要：湿法清洗制程是影响集成电路芯片良率的重要因素,气动液体隔膜阀是湿法装备中核心零部件之一。为了解决阀门的生产问题,以集成电路用超洁净气动液体隔膜阀为例,对其结构工作原理和关键密封件进行了论述,并基于氟塑料从原料、结构设计与优化、加工工艺和产品性能四个方面分析了超洁净气动液体隔膜阀生产需要解决的问题,同时也对未来同类阀门的设计指明了方向。Wet cleaning process is an important factor affecting IC chip yield,and the pneumatic liquid diaphragm valve is one of the core components in wet process equipment.In order to solve production problem of the valve,this paper takes an ultra-clean pneumatic liquid diaphragm valve for integrated circuits(IC)as an example,discusses its structural working principle and key seals,and analyzes the problems that need to be solved in production of ultra-clean pneumatic liquid diaphragm valve based on fluoroplastics from four aspects:raw materials,structural design and optimization,processing technology and product performance,and also points out a direction for the design of similar valves in the future.

关 键 词：集成电路 湿法清洗 氟塑料 气动隔膜阀门 

分 类 号：TN305[电子电信—物理电子学]