导电电极对电阻浆料阻值的影响  

Effect of conductive electrode on resistance of resistance paste

作　　者：鹿宁 陈向红 王妮 党丽萍 殷美 LU Ning;CHEN Xianghong;WANG Ni;DANG Liping;YIN Mei(Xi􀆳an Hongxing Electronic Paste Co.,Ltd.,Xi􀆳an 710000,China)

机构地区：[1]西安宏星电子浆料股份有限责任公司,陕西西安710000

出　　处：《电子元件与材料》2022年第11期1245-1250,共6页Electronic Components And Materials

摘　　要：为了研究集成电路中导电电极和电阻宽度对厚膜电阻浆料阻值的影响,以低阻(R-8210,阻值为1Ω)、中阻(R-8213,阻值为1 kΩ)、高阻(R-8216,阻值为1 MΩ)三种厚膜电阻浆料为研究对象,通过丝网印刷和高温烧结技术在氧化铝基片上制备了电阻和导体薄膜,采用扫描电子显微镜(SEM)和直流电阻电桥对薄膜的形貌和阻值进行测试。结果表明:当金导体浆料作为电极时,随着电阻长度的增加,电阻浆料阻值变化较小;当银钯导体和银导体作为电极时,随着电阻长度的增加,电阻浆料阻值变化明显。在相同导电电极下,电阻浆料为R-8210时,电阻宽度越大电阻浆料的阻值变化越大;电阻浆料为R-8213和R-8216时,电阻宽度对电阻浆料阻值的影响较小。Low resistance(R-8210,1Ω),medium resistance(R-8213,1 kΩ),and high resistance(R-8216,1 MΩ)thick film resistance pastes were used to study how conductive electrodes and resistor widths affect their resistance in integrated circuits.Resistor and conductor films were prepared on alumina substrates by screen printing and high temperature sintering technology.The morphology and resistance of the films were characterized by scanning electron microscope(SEM)and DC resistance bridge.The results show that the resistance vary slightly with the increase of resistance length when gold paste is used as the electrode,while it changes largely with the increase of resistance length when silver palladium or silver conductor are used as the electrode.For the same electrode,the resistance change largely for wider resistor using R-8210,while the change is minute for R-8213 and R-8216.

关 键 词：金导体 银钯导体 银导体 厚膜 电阻浆料 阻值 

分 类 号：TM241[一般工业技术—材料科学与工程]