基于文献数据可视化的真空镀膜技术研究与应用分析  

Research and Application Analysis of Vacuum Coating Technology Based on Literature Data Visualization

作　　者：李晓刚 黎子辉 叶俊文 LI Xiaogang;LI Zihui;YE Junwen(Zhongshan Kaixuan Vacuum Science&Technology Co.Ltd.,Zhongshan 528478,China;South China University of Technology,Guangzhou 510641,China;Zhongshan Institute of Standardization,Zhongshan 528403,China)

机构地区：[1]中山凯旋真空科技股份有限公司,中山528478 [2]华南理工大学,广州510641 [3]广东省中山市质量技术监督标准与编码所,中山528403

出　　处：《真空科学与技术学报》2022年第11期863-875,共13页Chinese Journal of Vacuum Science and Technology

基　　金：国家市场监督管理总局科技项目(2020MK082)。

摘　　要：一项技术应用的热度和广度,与其本身的技术优势、成熟度、适用性等密切相关。本文以文献数据可视化为手段对真空镀膜技术在世界范围内的研究及应用情况进行分析,以探究该技术的应用广度和热度特征,为真空镀膜技术装备的行业发展提供有益参考。研究发现离子束溅射、离子束辅助沉积、等离子体辅助物理气相沉积和原子层沉积技术是当前及以后一个时期内应重点关注的方向。The popularity and breadth of the application of a technology are closely related to its technical advantages, maturity, applicability, etc. Through the analysis of the research and application of vacuum coating technology in the world based on literature data visualization, this paper explores the application scope and attention degree of this technology and provides a useful reference for the development of vacuum coating technology and the equipment industry. The results show that the Ion Beam Sputtering(IBS), Ion beam Assisted Deposition(IAD), Plasma ion-assisted Deposition(PIAD), and Atomic Layer Deposition(ALD) technologies are the focus of attention at present and in the future.

关 键 词：真空镀膜 统计分析 物理气相沉积 化学气相沉积 热度 

分 类 号：TB43[一般工业技术]