基于电涡流传感器的机床导轨运动误差在机测量方法  

On-line measurement method of machine tool guide rail motion error based on eddy current sensor

作　　者：殷骁 张记云 娄志峰[1] YIN Xiao;ZHANG Jiyun;LOU Zhifeng

机构地区：[1]大连理工大学机械工程学院,辽宁大连116024

出　　处：《现代机械》2022年第6期52-57,共6页Modern Machinery

基　　金：辽宁省中央引导地方科技发展专项(2020JH6/10500017);大连理工大学基本科研业务费项目(DUT21LAB109)。

摘　　要：机床导轨运动时产生6个自由度的误差,在机检测其多自由度误差一直是难点。本文提出了一种嵌入电涡流位移传感器的直线导轨多自由度误差在机测量方法,在机测量导轨的两个直线度和滚动角。研究了参考基准的参考面误差以及安装平行度误差对测量结果的影响,提出了标定和补偿方法。并通过该装置的静态与动态对比实验表明,导轨行程200 mm时,直线度误差的对比残差为±3.7μm,滚动角的对比残差为±5″。证实该装置可有效测量导轨运动误差,为多自由度在机测量系统的发展提供了研究基础。Machine tool guide rail will generate six-degree-of-freedom errors when moving,and on-line measurement of its multi-degree-of-freedom errors has always been a challenge.In this paper,an on-line measurement method of multi-degree-of-freedom error of the linear guide rail embedded with eddy current displacement sensor is proposed to measure the two straightness and roll angle of the guide rail.The influence of the reference plane error and the installation parallelism error on the measurement results is studied,and the calibration and compensation methods are proposed.Through the static and dynamic comparison experiments of the device,it is found that when the guide rail travels 200 mm,the comparison residual of straightness error is±3.7μm,and the comparison residual of roll angle is±5″.It is confirmed that the device can effectively measure the guide rail motion error.This study has provided a research basis for the development of multi-degree-of-freedom on-line measurement system.

关 键 词：电涡流传感器 直线导轨 多自由度 在机测量 

分 类 号：TG87[金属学及工艺—公差测量技术]