质量参数评价在微纳米间距标准样板中的应用  

Application of Quality Parameter Evaluation in Micro-Nano Pitch Standard Template

作　　者：许晓青[1] 李锁印[2] 赵琳[2] 韩志国[2] 张晓东 吴爱华[1] XU Xiaoqing;LI Suoyin;ZHAO Lin;HAN Zhiguo;ZHANG Xiaodong;WU Aihua(The 13th Institute of CETC,Shijiazhuang Hebei 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所计量维修部,河北石家庄050051 [2]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《传感技术学报》2022年第11期1458-1462,共5页Chinese Journal of Sensors and Actuators

摘　　要：微纳米间距标准样板作为微纳米几何量量值溯源体系中的重要组成部分,是纳米科技发展的基础保证。通过对微纳米间距样板作为标准物质基本要求的论述,指出了对比度、均匀性和稳定性考核在标准样板质量参数评价中的重要作用。以SEM作为测量仪器,对不同材料的样板进行了对比度测量;以CD-SEM作为测量仪器,对不同标称间距和不同生产单位的标准样板进行了均匀性、稳定性实验以及测量不确定度分析;通过质量参数评价实验和分析,为微纳米间距标准样板的制作和使用提供重要的理论依据。实验结果表明,质量参数评价在微纳米间距样板作为标准物质使用时具有十分重要的作用。As an important part of traceability chain for micro-nano geometric quantity,micro-nano pitch standard template is the basic guarantee for the development of micro-nano technology.By discussing the micro-nano pitch template as the standard substance,the important effect of contrast、uniformity and stability assessment in the quality parameter evaluation of standard template is pointed out.By using SEM as the evaluation instrument,the contrast of templates of different materials are measured;By using CD-SEM as the evaluation instrument,the uniformity,stability experiments and uncertainty in measurement of templates with different nominal pitch and different manufacturer are carried out.Through the experiment and analysis of the quality parameter evaluation,it provides an important theoretical basis for the production and use of micro-nano pitch standard template.The experimental results show that the evaluation of quality parameters plays an important role in the use of micro-nano pitch template as standard substance.

关 键 词：微纳米 质量参数 评价方法 间距 对比度 均匀性 稳定性 

分 类 号：TB921[一般工业技术—计量学]