基于多轴对准定位平台提升LDI机生产效率的探讨  

Discussion on improving the production efficiency of LDI machine based on multi-axis alignment positioning stage

作　　者：李辉 方林 刘国藩 杨坤伦 侯荣伟 Li Hui;Fang Lin;Liu Guofan;Yang Kunlun;Hou Rongwei(Circuit Fabology Microelectronics Equipment CO.,LTD.,Anhui Hefei,230000)

机构地区：[1]合肥芯碁微电子装备股份有限公司,安徽合肥230000

出　　处：《印制电路信息》2022年第12期1-6,共6页Printed Circuit Information

摘　　要：为了满足印制电路板分区域基板对位应用需求,提升LDI机生产效率,文章设计了一种应用于LDI机的多轴对准定位平台。多轴对准定位平台包含多组对准定位平台,通过平台控制系统移动对准定位平台到基板对位点,对准测量系统采集多对位点图像信息,使用LDI技术实现图形转移完成基板曝光。从对准时间测试数据分析看,随着基板分区域越多,以及对准定位平台轴数的增多,多轴对准定位平台提升LDI机生产效率越显著。In order to meet the application requirements of sub-region exposure substrate alignment of Printed Circuit Board, and to improve the production efficiency of LDI exposure machine, one kind of multi-axis alignment positioning stage is designed and applied to LDI exposure machine. The multi-axis alignment positioning stage contains multiple alignment positioning stage. The stage control system moves alignment positioning stage to alignment points of substrate,then alignment measuring system collects the image information of alignment points, thus LDI technology is used to realize the graphic transfer and complete the substrate exposure. From analysis of the alignment time test data, and with more subregions of substrate and axis number of the alignment positioning stage, more significant production efficiency of LDI exposure machine is improved by multi-axis alignment positioning stage.

关 键 词：激光直接成像 对准测量系统 对准定位平台 运动控制 

分 类 号：TN41[电子电信—微电子学与固体电子学]