用于扫描电子显微镜校准的10μm格栅样板  

10μm Lattice Sample for Scanning Electron Microscope Calibration

作　　者：张晓东 赵琳[1] 李锁印[1] 韩志国[1] 许晓青[1] 吴爱华[1] ZHANG Xiao-dong;ZHAO Lin;LI Suo-yin;HAN Zhi-guo;XU Xiao-qing;WU Ai-hua(The 13th Institute of CETC,Shijiazhuang,Hebei 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《计量学报》2022年第12期1544-1548,共5页Acta Metrologica Sinica

摘　　要：扫描电子显微镜是半导体领域用于关键尺寸测量的重要仪器。为了保证仪器量值的准确和一致,需要对扫描电子显微镜进行校准。首先,针对校准规范中提到的正交畸变和线性失真度参数,采用半导体工艺,研制了一种标称值为10μm的格栅样板。其次,为了准确评价格栅特征的一致性,研究了一种矩形检测算法。测量过程中,使用该算法对样板的格栅特征进行测量,并把使用原子力显微镜获取的测量数据作为参考值。实验结果显示:矩形检测算法能够快速检测出格栅特征,测试数据稳定在6 nm以内。此外,研制的格栅样板一致性好,一致性参数控制在0.2以内,能够应用于扫描电子显微镜的校准。Scanning electron microscope(SEM)is an important instrument for critical dimension measurement in the semiconductor field.In order to ensure the accuracy and consistency of the instrument value,the SEM needs to be calibrated.First of all,for the orthogonal distortion and linear distortion parameters mentioned in the calibration specification,a lattice sample with a nominal value of 10μm is developed by using semiconductor technology.Secondly,in order to accurately evaluate the consistency of lattice features,a rectangle detection algorithm is studied.During the measurement process,the algorithm is used to measure the lattice features of the sample,and the measurement data obtained by the atomic force microscope(AFM)is used as the reference value.The experimental results show that the rectangle detection algorithm can detect the lattice features quickly,and the test data is stable within 6nm.In addition,the developed lattice sample has good consistency,and the consistency parameters are controlled within 0.2,which can applied to the calibration of SEM.

关 键 词：计量学 格栅样板 扫描电子显微镜 矩形检测算法 原子力显微镜 校准 

分 类 号：TB921[一般工业技术—计量学]