一种提升六方氮化硼抗氧化性的洁净干转移方法  

A clean dry transfer of hexagonal boron nitride with improved oxidation resistance

作　　者：李雪梅 李郑扬 祁陆乔 龙雨洋 李保文 李基东 周建新 师岩 殷俊 郭万林 Xuemei Li;Zhengyang Li;Luqiao Qi;Yuyang Long;Baowen Li;Jidong Li;Jianxin Zhou;Yan Shi;Jun Yin;Wanlin Guo(State Key Laboratory of Mechanics and Control of Mechanical Structures,Key Laboratory for Intelligent Nano Materials and Devices of the Ministry of Education,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China;College of Material Science and Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China;College of Aerospace engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China;Institute for Frontier Science,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]State Key Laboratory of Mechanics and Control of Mechanical Structures,Key Laboratory for Intelligent Nano Materials and Devices of the Ministry of Education,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China [2]College of Material Science and Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China [3]College of Aerospace engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China [4]Institute for Frontier Science,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China

出　　处：《Science China Materials》2023年第1期327-334,共8页中国科学（材料科学（英文版）

基　　金：supported by the National Key Research and Development Program of China(2019YFA0705400);the National Natural Science Foundation of China(12172176,52002175,and 11802121);the Joint Fund of Advanced Aerospace Manufacturing Technology Research(U1937601);the Natural Science Foundation of Jiangsu Province(BK20211191 and BK20212008);the Research Fund of State Key Laboratory of Mechanics and Control of Mechanical Structures(MCMS-I-0421G01 and MCMS-I-0421K01);China Postdoctoral Science Foundation(2018T110494,2020TQ0146,2021M701703,and 2021M701705);the Fundamental Research Funds for the Central Universities(NE2020001,NJ2020003,NZ2020001,and NS2021042);the Priority Academic Program Development of Jiangsu Higher Education Institutions。

摘　　要：六方氮化硼(h-BN)是一种具有出色热稳定性和化学惰性的二维材料,在苛刻条件下应用广泛.然而,表面金属催化剂会使其抗氧化性显著降低.对于通过化学气相沉积制备的样品,常规通过湿法蚀刻金属基底的转移方法不可避免地会引入金属残留.我们这里提出了一种针对铜表面生长的单层h-BN薄膜的洁净干转移方法.空气环境下界面氧插层和表面铜氧化导致界面粘附能量显著降低,因而h-BN薄膜可以从基底上被直接机械剥离开.与湿法转移制备的薄膜形成鲜明对比,干法转移得到的h-BN薄膜几乎没有金属(铁)污染,使其抗氧化性提高了50–100℃,甚至接近其本征性能.在干法转移的单层h-BN薄膜保护下,单层石墨烯在空气中的耐受温度提高到700℃,展示了这一干转移方法的优势.Hexagonal boron nitride(h-BN)is an outstanding two-dimensional material in terms of thermal stability and chemical inertness,enabling its versatile applications under harsh conditions.However,the oxidation resistance of h-BN is significantly reduced in the presence of metallic catalysts,which could be readily introduced during commonly adapted transfer methods of chemical vapor-deposited samples through the wet etching of metallic substrates.Here we propose a clean dry transfer method for monolayer hBN film grown on the copper(Cu)surface.Thus,the mechanical delamination of the h-BN film from the substrates becomes feasible as their interfacial adhesion energy is significantly reduced because of the oxygen intercalation and surface oxidation of Cu during exposure to air.The drytransferred h-BN film is proven to be free of metallic(iron)contaminants,in sharp contrast to the wet-transferred h-BN film,which contains significant amounts of metallic residues.The clean transfer of h-BN considerably enhances its oxidation resistance by 50±100℃,yielding nearly the ideal performance of h-BN.As a result,graphene layers coated with drytransferred monolayer h-BN film exhibit enhanced robustness to temperatures in the air up to 700℃,indicating the advantage of the proposed dry transfer method.

关 键 词：苛刻条件 化学惰性 金属催化剂 六方氮化硼 化学气相沉积 抗氧化性 BN薄膜 金属基底 

分 类 号：TG174.4[金属学及工艺—金属表面处理]