基于MEMS技术的仿生纤毛风速传感器的设计和仿真  

Design and Simulation of Bioinspired Flow Sensor Based on MEMS Technology

作　　者：卢建勋 周南彦 刘武[1] LU Jianxun;ZHOU Nanyan;LIU Wu(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiaotong University,Shanghai 200240,CHN;Dept.of Micro/Nano Electronics,Shanghai Jiaotong University,Shanghai 200240,CHN)

机构地区：[1]上海交通大学微米/纳米加工技术国家级重点实验室,上海200240 [2]上海交通大学微纳电子学系,上海200240

出　　处：《半导体光电》2022年第6期1075-1079,共5页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(61871266);上海市科委专业技术服务平台项目(19DZ2291103)。

摘　　要：设计了一种可以实现二维风速测量的电容式纤毛传感器,其特点为通过差分电容检测流速,传感器运动结构所对应的背硅被完全刻蚀。采用有限元分析软件,通过流体-固体-静电场的多物理场仿真,分析得到了传感器的差分电容与风速的变化关系。结合电容传感器AD7746的理论精度,计算得出传感器的风速灵敏度为0.25 mm/s。此外,设计了基于SOI硅片的传感器微加工制备的工艺流程。A capacitive artificial hair sensor that enables two-dimensional wind velocity measurement was designed. The sensor detected flow velocity by differential capacitance, and the handle layer of wafer corresponding to the sensor motion structure was completely etched. The relationship between the differential capacitance of the sensor and the wind velocity was analyzed and obtained by multi-physics field simulation of fluid-solid-electrostatics field using finite element analysis software. With the theoretical accuracy of the capacitance sensor AD7746, the wind velocity sensitivity of the sensor is calculated to be 0.25 mm/s. In addition, a process flow for the microfabrication of the sensor based on SOI wafer was designed.

关 键 词：MEMS 流速传感器 仿真 差分电容 纤毛 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]