基于非均匀采样的五棱镜阵列扫描测量大口径准直波前  

Scanning Measurement of Large Aperture Collimated Wavefront with Pentaprism Array Based on Nonuniform Sampling

作　　者：刘威剑 高志山[1] 马燚岑 车啸宇 雷李华[2] 傅云霞[2] 袁群[1] Liu Weijian;Gao Zhishan;Ma Yicen;Che Xiaoyu;Lei Lihua;Fu Yunxia;Yuan Qun(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,Jiangsu,China;Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]上海市计量测试技术研究院,上海201203

出　　处：《中国激光》2022年第24期20-28,共9页Chinese Journal of Lasers

基　　金：国家重点研发计划(2019YFB2005500);国家自然科学基金(62175107,U1931120);江苏省六大人才高峰项目(RJFW-019);中国科学院光学系统先进制造技术重点实验室基金(KLOMT190201);上海在线检测与控制技术重点实验室基金(A04202130002)。

摘　　要：五棱镜扫描法通过沿扫描方向连续采集子孔径光束会聚点的坐标,由斜率反演波前分布,是检测大口径准直波前的常用方法。在传统的一维五棱镜扫描法的基础上,提出添加多个五棱镜,形成一组并联的五棱镜和一组串联的五棱镜,实现了一种基于非均匀采样的五棱镜阵列扫描测量大口径准直波前三维分布的方法。该方法通过三个平行于扫描方向的并联五棱镜同时测量准直波前X方向的斜率,三个垂直于扫描方向的串联五棱镜同时测量准直波前Y方向的斜率,采用Zernike多项式中4~11项的导函数拟合测量得到的斜率,继而获得用Zernike多项式表征的准直波前三维分布。该方法只需要一次扫描测量,就能同时获得待测波前三条线上的斜率,避免了传统方法测量全口径准直波前时需要在X、Y方向进行的多次扫描,优化了扫描机构,缩短了扫描检测时间,实现了全口径准直波前的快速检测。通过仿真验证了使用待测波前三条线上斜率复原待测波前的可行性与准确性。应用该方法对1 m口径准直波前进行了检测,并与干涉法检测结果进行了对比,两种方法得到的准直波前数值与分布形式基本一致,证明了该方法的可行性。Objective Collimated wavefront is an important parameter to estimate the quality of optical systems such as collimator,i nterferometer,and camera lens.Pentaprism scanning method is a conventional method to detect large aperture collimated wavefront by continuously collecting the coordinates of the focus of sub-aperture beams along the scanning direction and retrieving the wavefront distribution from the slope of the wavefront.The traditional pentaprism scanning method can only measure the wavefront distribution on one line of the collimated wavefront,and cannot obtain the full aperture aberration distribution of the wavefront.In order to obtain the full aperture aberration distribution of the wavefront,it is necessary to conduct multiple scans to obtain the slopes of multiple lines of the wavefront.This scanning method is often used for the surface shape detection of large aperture flat optical elements,through rotating the optical flat and measuring the slope of the surface in polar coordinates.However,the method is not suitable for measuring the collimated wavefront of the optical system.To measure the full aperture collimated wavefront,two pentaprism scanning systems in the X and Y directions,respectively,are generally required.The scanning mechanisms are complex,time-consuming,and vulnerable to environmental disturbances.In this paper,pentaprism array is proposed to simplify the scanning mechanism,shorten the scanning detection time of the full aperture collimated wavefront,and realize the rapid detection of the collimated wavefront.Methods Based on the traditional one-dimensional pentaprism scanning method,we propose to add multiple pentaprisms t o form a group of parallel pentaprisms and a group of series pentaprisms,and realize a pentaprism array scanning based on nonuniform sampling to measure the three-dimensional distribution of large aperture collimated wavefront.Three parallel pentaprisms parallel to the scanning direction are used to measure the slope of the collimated wavefront in the X direction,an

关 键 词：测量 五棱镜扫描法 波前检测 非均匀采样 波前复原 

分 类 号：O436[机械工程—光学工程]