42°Y钽酸锂晶体生长及性能研究  

Study on Growth and Properties of 42°Rotated Y Cut Lithium Tantalate Single Crystals

作　　者：于明晓[1] 龙勇[1] 石自彬[1] 陈哲明 邹少红 丁雨憧[1] YU Mingxiao;LONG Yong;SHI Zibing;CHEN Zheming;ZOU Shaohong;DING Yuchong(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2023年第1期26-28,共3页Piezoelectrics & Acoustooptics

基　　金：总装备部材料支撑项目。

摘　　要：钽酸锂晶体具有优异的压电性能,是声表面波(SAW)滤波器广泛使用的衬底材料。该文采用自主研制的提拉单晶炉,成功生长出4英寸、42°Y方向、外观完整的钽酸锂晶体。经可见及近红外分光光度计测试,晶体透过率接近80%;经X线摇摆测试,其半高全峰宽(FWHM)为28.4″,单晶性较好;采用差热分析仪对生长的晶体头尾进行居里温度测试,居里温度偏差为4.4℃。声表面波性能测试结果表明,钽酸锂晶体的声表面波速度、机电耦合系数和频率温度系数等指标均满足SAW滤波器的使用要求。The lithium tantalate(LiTaO 3)single crystals have excellent piezoelectric properties and are widely used as substrate material for SAW filters.In this work,an 4 inch,42°rotated Y cut,integral,crack-free LiTaO 3 single crystal was successfully grown using the in-house developed Czochralski(CZ)furnace.The transmittance is close to 80%by the visible and near infrared spectrophotometer test,its full width at half maximum(FWHM)is 28.4″by X-ray rocking test,which show that the grown crystal has good single crystal property.The Curie temperature of the head and tail of the grown crystal is measured by the differential thermal analyzer,and the Curie temperature deviation is 4.4℃.The results of SAW performance test show that the SAW velocity,electromechanical coupling coefficient and frequency temperature coefficient of LiTaO 3 single crystal meet the requirements of SAW filter.

关 键 词：钽酸锂 晶体 提拉法 声表面波滤波器 

分 类 号：TN384[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]