镁合金微弧氧化膜上不同功率磁控溅射制得复合膜的摩擦学性能研究  

Study on Tribological Properties of Duplex Coating Formed on Magnesium Alloy Using Micro⁃Arc Oxidation and Magnetron Sputtering under Different Power

作　　者：安凌云 常成功[2,3] 岳峥 王钊 康迪菘 赵迎杰 孟雷超 AN Ling-yun;CHANG Cheng-gong;YUE Zheng;WANG Zhao;KANG Di-song;ZHAO Ying-jie;MENG Lei-chao(Qinghai Provincial Key Laboratory of Nanomaterials and Technology,College of Physics and Electronic Information Engineering,Qinghai Minzu University,Xining 810007,China;Key Laboratory of Comprehensive and Highly Efficient Utilization of Salt Lake Resources,Qinghai Institute of Salt Lake,Chinese Academy of Sciences,Xining 810008,China;Key Laboratory of Salt Lake Resources Chemistry of Qinghai Province,Xining 810008,China;Qinghai Xince Technology Co.,Ltd.,Xining 810007,China)

机构地区：[1]青海民族大学物理与电子信息工程学院青海省纳米材料与技术重点实验室,青海西宁810007 [2]中国科学院青海盐湖研究所中国科学院盐湖资源综合高效重点实验室,青海西宁810008 [3]青海省盐湖资源化学重点实验室,青海西宁810008 [4]青海芯测科技有限公司,青海西宁810007

出　　处：《材料保护》2023年第3期20-27,40,共9页Materials Protection

基　　金：青海省自然科学基金(2020-ZJ-966Q);青海民族大学高层次人才项目(2021XJG13);青海民族大学纳米材料与纳米技术PI科研创新团队项目(2021-2023);青海省“昆仑英才·高端创新创业人才”拔尖人才项目资助。

摘　　要：为进一步改善镁合金微弧氧化膜的摩擦学性能,在该微弧氧化膜上,采用磁控溅射技术,在不同功率下沉积碳膜,制备碳含量不同的微弧氧化/磁控溅射复合膜。利用拉曼光谱仪检测膜层中碳结构,采用扫描电镜(SEM)和能谱(EDS)考察膜层摩擦磨损前后微观形貌、元素组成、分布及含量;应用球-盘摩擦试验机研究膜层摩擦学性能。结果表明:利用磁控溅射技术在镁合金微弧氧化膜表面沉积的碳膜,部分地封闭了微弧氧化膜微孔,减小了微孔孔径和微孔数量,降低了膜层表面粗糙度。复合膜在摩擦磨损过程中,摩擦系数较小,磨痕较窄且浅,磨损率较低,呈现出较优异的摩擦学性能。功率对微弧氧化/磁控溅射复合膜具有明显的影响,高溅射功率下制备的复合膜,由于拥有更光滑的表面,更多地具有自润滑特性的碳,摩擦系数更小,磨痕更窄且浅,磨损率更低,摩擦学性能更为优异,尤其是在高载荷下,可对基体提供更显著的保护。For further improving the tribological properties of magnesium alloy micro⁃arc oxidation(MAO)coating,a carbon film was deposited on such coating by magnetron sputtering(MS)technology under different sputtering power to prepare duplex MAO/MS coating with different carbon contents.The carbon structure in the coating was tested by Raman spectrometer.Scanning electron microscope(SEM)and energy spectrum(EDS)were employed to analyze the micro morphology and the elemental composition,distribution and content of coatings before and after friction and wear test.Additionally,the tribological properties of the coatings were studied by the ball⁃on⁃disk friction tester.Results showed that the carbon film deposited on the surface of the magnesium alloy MAO coating by MS technology partly sealed the micro⁃pores of MAO coating,and reduced the size and number of micro⁃pores as well as the coating’s surface roughness.During the friction and wear process,the duplex coatings exhibited a low friction coefficient,narrow and shallow wear scars,and a small wear rate,indicating that they possessed excellent tribological properties.Moreover,sputtering power had a significant effect on the duplex MAO/MS coatings.The duplex coating prepared under high sputtering power possessed better tribological properties due to lower friction coefficient,narrower and shallower wear scars as well as smaller wear rate,which were attributed to a smoother surface and a larger quantity of C with self⁃lubricating characteris⁃tic.The as⁃prepared coating could provide a better protection on the substrate especially under high load.

关 键 词：镁合金 微弧氧化 磁控溅射 碳膜 溅射功率 摩擦学性能 

分 类 号：TG174.44[金属学及工艺—金属表面处理]