离子束溅射Lan-WDM滤光膜膜厚均匀性的研究  

Study on The Uniformity of Lan-WDM Filter Film Thickness by Ion Beam Sputtering

作　　者：齐双阳 刘冬梅[1] 朱忠尧 张于帅 韩克旭 QI Shuangyang;LIU Dongmei;ZHU Zhongyao;ZHANG Yushuai;HAN Kexu(School of Opto-Electronic Engineering,Changchun University of Science and Technology,Changchun 130022;Beijing Space Electromechanical Research Institute,Beijing 100049;Suzhou Haolian Optoelectronics Technology Co.,Ltd,Suzhou 215000)

机构地区：[1]长春理工大学光电工程学院,长春130022 [2]北京空间机电研究所,北京100049 [3]苏州浩联光电科技有限公司,苏州215000

出　　处：《长春理工大学学报（自然科学版）》2023年第2期25-31,共7页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：吉林省重大科技攻关专项(20190302095GX)。

摘　　要：光通信Lan-WDM滤光膜采用离子束溅射(IBS)沉积制备时,由于膜厚分布不均匀会导致光谱中心波长的漂移,影响有效镀膜区域。分析了离子束溅射膜厚分布特点,根据Ove Lyngnes提出的膜厚均匀性修正模型,通过修正Mask挡板来改善Ta_(2)O_(5)、SiO_(2)的膜厚均匀性。经过多次修正Mask实验,最终在12英寸的基板上,分别将Ta_(2)O_(5)和SiO_(2)的主Mask挡板在径向方向每一点膜厚均匀性修到小于0.1%;辅Mask挡板将内圈和外圈的膜厚均匀性修到大于1.5%,且呈线性关系。制备中心波长分别为1 295.56 nm、1 300.05 nm、1 304.58 nm、1 309.14 nm的Lan-WDM(细波分复用)滤光膜,测得光谱透射率有效镀膜区面积相比原来分别增大了2.01倍、2.20倍、2.25倍、2.04倍,提高了滤光膜的生产效率。When the optical communication Lan-WDM filter film is prepared by ion beam sputtering(IBS)deposition,the uneven film thickness distribution will cause the shift of the center wavelength of the spectrum,which affects the effective coating area.In this paper,the characteristics of ion beam sputtering film thickness distribution are analyzed.According to the film thickness uniformity correction model proposed by Ove Lyngnes,the mask baffle is modified to improve the film thickness uniformity of Ta_(2)O_(5) and SiO_(2).After several corrections of the Mask experiment,finally on a 12-inch substrate,the film thickness uniformity of the main mask baffle of Ta_(2)O_(5) and SiO_(2) in the radial direction was modified to less than 0.1%;the auxiliary mask baffle combined the inner ring and outer ring.The uniformity of the film thickness of the ring is repaired to more than 1.5%,and the relationship is linear.Lan-WDM(fine wavelength division multiplexing)filter films with center wavelengths of 1295.56 nm,1300.05 nm,1304.58 nm,1309.14nm were prepared,and the effective coating area of the measured spectral transmittance was increased by 2.01 times compared with the original.2.20 times,2.25 times,2.04 times,improved the production efficiency of the filter film.

关 键 词：薄膜 离子束溅射 膜厚均匀性 修正挡板 窄带滤光片 

分 类 号：O484[理学—固体物理]