基于平面反射式全息光栅的激光自混合纳米位移测量研究  

Research on laser self-mixing nano-displacement measurement based on plane reflective holographic grating

作　　者：张玉杰 徐雷 管钰晴 邹文哲 郭创为 雷李华[2,3] 傅云霞 郭珍艳[1] 顾振杰 邓晓 Zhang Yujie;Xu Lei;Guan Yuqing;Zou Wenzhe;Guo Chuangwei;Lei Lihua;Fu Yunxia;Guo Zhenyan;Gu Zhenjie;Deng Xiao(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China;Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China;Shanghai Key Laboratory of Online Test and Control Technology,Shanghai 201203,China;Chinese Society for Measurement,Beijing 100029,China;School of Physical Science and Engineering,Tongji University,Shanghai 200092,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]上海市计量测试技术研究院,上海201203 [3]上海市在线检测与控制技术重点实验室,上海201203 [4]中国计量测试学会,北京100029 [5]同济大学物理科学与工程学院,上海200092

出　　处：《红外与激光工程》2023年第4期227-234,共8页Infrared and Laser Engineering

基　　金：国家重点研发计划(2021YFF0603300);上海市学术/技术带头人项目(21XD1425000);上海科技自然科学基金(21ZR1483100)。

摘　　要：纳米位移测量技术是实现高精度纳米制造的基础。激光自混合干涉为精密纳米位移测量提供了一种结构简便、成本低廉,同时测量精度可达纳米量级的精密位移测量方法。区别于传统基于反射镜或散射面为反馈元件的激光自混合干涉测量方案,研究了一种基于平面反射式全息光栅的激光自混合纳米位移测量方法,该方法的位移测量结果以光栅的周期为基准。实验测得了在弱反馈强度条件下的光栅自混合干涉信号,通过阈值设定的方法确定位移方向的反转点,结合反余弦的相位解包裹算法处理光栅自混合信号,获得了对应的位移测量值。最终采用商用激光干涉仪与自组装的光栅自混合干涉仪进行位移测量数据的比对测量,实验结果表明,经过线性修正后,其位移误差不超过0.241%。Objective Nano-displacement measurement technology is an important branch in the field of precision measurement,its development and improvement are important guarantee for realizing high-precision nanomanufacturing.With the rise of laser self-mixing interference technology,the precision displacement measurement method with simple structure,low manufacturing cost and measurement accuracy up to nanometer level has been vigorously developed.Laser self-mixing interference technology has been widely used in displacement measurement,absolute distance measurement,speed measurement,and vibration measurement,etc.With the advantages of single optical path structure and the comparable measurement accuracy as double beam interference,the self-mixing interference technology has better application prospect in the industrial area.Traditional laser self-mixing interference schemes mostly take mirrors or scattering surfaces as target mirrors,which take laser wavelengths as measurement benchmarks and are easily disturbed by environmental changes.In order to increase the robustness of the measurement benchmark,this paper studies a laser self-mixing nanometer displacement measurement method based on a planar reflective holographic grating.Different from traditional laser self-mixing interference,the displacement measurement value based on grating feedback is determined by the period of the grating.Methods For the laser self-mixing displacement measurement method based on the plane reflective grating feedback,the vibration displacement value of the holographic grating is reconstructed in this paper.The displacement measurement value of this method is based on the grating period.The system setup is shown(Fig.1).The light emitted by the laser is incident on the grating surface at the Littrow angle,so the retro-reflect one-order diffraction light carry the Doppler phase shift caused by the displacement along the grating period direction.The self-mixing interference output laser is splitted by the structure composed of a half-wave plate

关 键 词：纳米位移测量 激光自混合 光栅干涉仪 全息光栅 

分 类 号：TB96[机械工程—光学工程]