一种投影物镜测试台的设计  

Design of a Projection Objective Test Bench

作　　者：宋兴龙 SONG Xinglong(Shanghai Microelectronics Equipment(Group)Co.,Ltd.,Shanghai 201203,China)

机构地区：[1]上海微电子装备(集团)股份有限公司,上海201203

出　　处：《集成电路应用》2023年第4期300-302,共3页Application of IC

摘　　要：阐述投影物镜测试台用于对投影物镜性能和接口进行测试验证,投影物镜测试台作为一种测量工具,其自身精度,操作便利性,维护性与最终物镜的交付质量也有着密切关系。探讨对测试台部分结构、投影物镜集成流程的优化设计,从而提高了测试台的使用效率。This paper describes the use of a projection objective test bench for testing and verifying the performance and interface of the projection objective.As a measurement tool,the accuracy,ease of operation,and maintenance of the projection objective test bench are closely related to the delivery quality of the final objective.It explores the optimization design of the partial structure of the test bench and the integration process of the projection objective lens,thereby improving the efficiency of the use of the test bench.

关 键 词：投影物镜 测试台 便利性设计 集成流程 

分 类 号：TN405[电子电信—微电子学与固体电子学]