高灵敏度热膨胀陀螺敏感机理研究  

Study on Sensitive Mechanism of High-Sensitivity Thermal Expansion Gyroscopes

作　　者：佟嘉程 朴林华[1] 李备 张严 TONG Jiacheng;PIAO Linhua;LI Bei;ZHANG Yan(Beijing Key Laboratory for sensor,Beijing Information Science&Technology University,Beijing 100101,China)

机构地区：[1]北京信息科技大学北京市传感器重点实验室,北京100101

出　　处：《压电与声光》2023年第2期202-208,共7页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(61771060);北京市新世纪百千万人才工程培养基金资助项目(2019A20);北京市自然科学基金重点资助项目(KZ201511232034);北京市重点实验室开放课题基金资助项目(2021202209);北京信息科技大学学科与研究生教育校内基金资助项目(202205D);现代测控技术教育部重点实验室基金资助项目(20222023D);北京信息科技大学北京市传感器重点实验室基金资助项目(202212)。

摘　　要：该文提出了一种高灵敏度的热膨胀陀螺,并对其敏感机理进行了研究。通过COMSOL创建了该结构的二维模型,并对其进行了有限元分析。结果表明,输入功率为5 mW,输入角速度范围为-1000~1000(°)/s时,提出的热膨胀陀螺温度灵敏度为2.12 mK·[(°)/s]^(-1),具有陀螺效应,且热膨胀陀螺灵敏度为1.98 mV·[(°)/s]^(-1),非线性度为7.64%。与之前的结构相比,陀螺灵敏度有提高。该高灵敏度热膨胀陀螺具有抗冲击能力强,制作成本低,工艺简单及可靠性高等优点,可用于航天、消费电子及军事等领域。In this paper,a high-sensitivity thermal expansion gyro was proposed,and its sensitive mechanism was studied.A 2D model of the structure was created by COMSOL,and the finite element analysis was carried out.The results show that when the input power is 5 mW,the input angular velocity range is-1000-1000(°)/s,the proposed thermal expansion gyroscope has gyroscopic effect and its temperature sensitivity is 2.12 mK·[(°)/s]^(-1).When the input power is 5 mW,the input angular velocity range is-1000-1000(°)/s,the sensitivity of the proposed thermal expansion gyro is 1.98 mV·[(°)/s]^(-1),and the nonlinearity is 7.64%.The gyro sensitivity is improved compared to the previous structure.The high-sensitivity thermal expansion gyro has the advantages of strong impact resistance,low production cost,simple process and high reliability,and can be used in aerospace,consumer electronics,military and other fields.

关 键 词：热膨胀陀螺 微机械 单轴 敏感机理 数学模型 

分 类 号：TN379[电子电信—物理电子学] TP202[自动化与计算机技术—检测技术与自动化装置]