±16g三质量块三轴MEMS电容式加速度计的设计  

Design of ±16 g Three-Mass Three-Axis MEMS Capacitive Accelerometer

作　　者：虎勇 李绍荣 郭威 蒋婷 郭小伟 邹力 任颖慧 梁杰 HU Yong;LI Shaorong;GUO Wei;JIANG Ting;GUO Xiaowei;ZOU Li;REN Yinghui;LIANG Jie(Yalong River Hydropower Development Company,Ltd,Chengdu 610051;School of Optoelectronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 610054;Yangtze Delta Region Institute(Huzhou),University of Electronic Science and Technology of China,Huzhou Zhejiang 313001)

机构地区：[1]雅砻江流域水电开发有限公司,成都610051 [2]电子科技大学光电科学与工程学院,成都610054 [3]电子科技大学长三角研究院(湖州),浙江湖州313001

出　　处：《电子科技大学学报》2023年第3期444-450,共7页Journal of University of Electronic Science and Technology of China

基　　金：雅砻江官地水力发电厂基于MEMS智能传感器的水工边坡风险实时监测试验研究科研项目的支持。

摘　　要：微电子机械系统(MEMS)惯性传感器(如加速计、陀螺仪)具有高性能、低功耗、低成本、集成度高、可靠性高、体积小等特点。但MEMS传感器交叉串扰仍较大,影响了加速度的测量。该文设计了一个量程为±16 g的三质量块三轴MEMS电容式加速度计结构,通过对所设计的结构进行静力学分析和模态分析,保证加速度计良好的抗过载能力。仿真结果表明,该结构实现了模态分离避免了模态干扰,且交叉灵敏度均小于0.3%,有效地降低了交叉串扰。Micro-Electro-Mechanical system(MEMS)inertial sensors(such as accelerometers,gyroscopes)have the characteristics of high performance,low power consumption,low cost,high integration,high reliability,and small size.Cross-talk is a major issue in designing MEMS accelerator,which greatly affects the measurement of acceleration in the sensitive direction.In this paper,we propose a three-mass three-axis MEMS capacitive accelerometer structure with a range of±16 g for reducing the problem.The static and modal analysis of the structure is made to ensure good anti-overload capability of the accelerometer.The simulation results show that the structure achieves modal separation and avoids modal interference,and the cross-sensitivity is less than 0.3%,which effectively reduces the cross-talk.

关 键 词：电容式加速度计 高精度 MEMS 三质量块 

分 类 号：TP73[自动化与计算机技术—检测技术与自动化装置]