薄膜热电偶热氧化可靠性及结构优化  

Thermal oxidation reliability and structure optimization of thin film thermocouple

作　　者：王一丹 孙宇锋[1] 雷东阳 薛雨晴 WANG Yidan;SUN Yufeng;LEI Dongyang;XUE Yuqing(School of Reliability and Systems Engineering,Beihang University,Beijing 100191,China)

机构地区：[1]北京航空航天大学可靠性与系统工程学院,北京100191

出　　处：《北京航空航天大学学报》2023年第4期943-948,共6页Journal of Beijing University of Aeronautics and Astronautics

基　　金：国家重点研发计划(2018YFB2003100,2018YFB2003101)。

摘　　要：航空发动机涡轮叶片处于发动机温度最高的部位,将薄膜材料制备于待测物表面形成热电偶传感器,可及时有效的对涡轮叶片进行测温。薄膜热电偶多层膜间的热氧化界面扩散失效是导致薄膜可靠性不高的主要原因之一,基于Fick第二定律提出多层膜扩散可靠性模型,定量描述薄膜热电偶扩散失效机理,通过仿真计算,结合粒子群算法,以薄膜寿命最大为目标,寻优得到各膜层对应的最佳结构,为结构工艺上提高薄膜热电偶寿命的研究提供了一定的借鉴。The part of an aero engine with the highest temperature is the turbine blade.The film material is prepared on the surface of the object to be measured to form a thermocouple sensor,which can timely and effectively measure the temperature of the turbine blade.The diffusion failure of the thermal oxidation interface between multilayer films of thin film thermocoupleis one of the main reasons for the low reliability of thin film thermocouples.One of the main causes of the low reliability of thin film thermocouples is the diffusion failure of the thermal oxidation interface between multilayer layers.Based on Fick's second law,this paper proposes a diffusion reliability model of multilayer film to quantitatively describe the diffusion failure mechanism of thin film thermocouples.Through simulation calculation and particle swarm optimization,the optimal structure of each layer is obtained with the goal of maximizing the lifetime of thin-film,It provides a certain method reference for improving the lifetime of thin film thermocouple in structure and technology.

关 键 词：薄膜热电偶 界面扩散 可靠性 粒子群 优化仿真 

分 类 号：V23[航空宇航科学与技术—航空宇航推进理论与工程] TB114.3[理学—概率论与数理统计]