薄膜生长数据自动化采集技术研究  

Research on Automated Data Acquisition Technology of Thin Film Growth

作　　者：王丹 周明波[1] 李云龙 何露[1] 孙伟轩 林泽丰 李佳豪 竺云 陈其宏[1] 张宝花 袁洁[1] 翁红明[1,3] WANG Dan;ZHOU Mingbo;LI Yunlong;HE Lu;SUN Weixuan;LIN Zefeng;LI Jiahao;ZHU Yun;CHEN Qihong;ZHANG Baohua;YUAN Jie;WENG Hongming(Institute of Physics,Chinese Academy of Sciences,Beijing 100190,China;Computer Network information Center,Chinese Academy of Sciences,Beijing 100083,China;Condensed Matter Physics Data Center,Chinese Academy of Sciences,Beijing 100190,China;Bureau of Frontier Science and Education,Chinese Academy of Sciences,Beijing 100864,China;Tianjin Normal University,Tianjin 300387,China)

机构地区：[1]中国科学院物理研究所,北京100190 [2]中国科学院计算机网络信息中心,北京100083 [3]中国科学院凝聚态物质科学数据中心,北京100190 [4]中国科学院前沿科学与教育局,北京100864 [5]天津师范大学,天津300387

出　　处：《数据与计算发展前沿》2023年第3期29-38,共10页Frontiers of Data & Computing

基　　金：中国科学院科学网信专项2022年度应用示范项目(CAS-WX2021SF-0102)。

摘　　要：[目的]本研究旨在通过自动化采集薄膜生长数据,从而提高薄膜数据采集的效率,大幅加快薄膜研究及工艺摸索。[应用背景]随着薄膜技术的不断发展和应用,需要对薄膜生长过程进行深入的研究,以便更好地理解薄膜生长的机制。然而,目前的薄膜生长研究往往依赖于手动采集数据,存在效率低下和数据误差较大的问题。[方法]为了解决这些问题,我们研发了电子实验记录本来规范数据采集,并通过自编采集程序实现了从薄膜合成和测试设备上对整个实验过程数据的全自动化采集方法。[结论]该方法实现了对薄膜生长过程的高精度、高效率、无人工干预的实时监控和数据采集,为进一步研究薄膜生长机理和开发新型薄膜提供了实验基础和理论指导。[Objective]This research aims to improve the efficiency of film data acquisition by automatical collecting techniques,thereby greatly promoting the research on film growth.[Application background]With the development and application of thin film technology,a deeper understanding of the film growth process is necessary to improve our ability to comprehend and manipulate film growth effectively.However,most of the current data collection processes rely on manual methods,which probably leads to low efficiency and data error.[Methods]In order to solve these problems,we developed electronic experimental notebooks to standardize the data collection and realized automated acquisition of the whole-process data from thin film synthesis and characterization.[Conclusions]The real-time monitoring and data acquisition of the film growth process with high precision,high efficiency,and no manual intervention is realized,which provides a more solid experimental basis and theoretical clues for further film research.

关 键 词：薄膜生长 数据采集 电子实验记录本 

分 类 号：TB383.2[一般工业技术—材料科学与工程]