一种高精度CMOS温度传感器校准电路  

Calibration Circuit for High Precision CMOS Temperature Sensor

作　　者：卓琳[1] 邵杰 任凤霞 万书芹[1] 章宇新 黄立朝 ZHUO Lin;SHAO Jie;REN Fengxia;WAN Shuqin;ZHANG Yuxin;HUANG Lichao(China Electronics Technology Group Corporation No.58 Research Institute,Wuxi 214035,China)

机构地区：[1]中国电子科技集团公司第五十八研究所,江苏无锡214035

出　　处：《电子与封装》2023年第6期61-65,共5页Electronics & Packaging

摘　　要：针对集成式传感器中CMOS器件非理想因素导致的测量误差,设计了一种数字校准电路,校准电路由存储模块、失调误差校准模块和增益误差校准模块等组成。因模拟器件受温度影响较大,不同温度的增益线性度不同,所以增益误差采用分温度区间进行校准。电路采用0.18μm CMOS工艺实现,校准后温度传感器误差可提高到-0.03~+0.13℃。Aiming at the measurement errors caused by the non-ideal factors of CMOS devices in integrated sensors,a digital calibration circuit is designed.The calibration circuit is composed of a memory module,an offset error calibration module,a gain error calibration module and so on.Because the analog devices are greatly influenced by temperature and the gain linearity varies at different temperatures,the gain error is calibrated by sub-temperature intervals.The circuit is implemented in 0.18μm CMOS technology,and the error of the temperature sensor can be improved to-0.03-+0.13℃after calibration.

关 键 词：温度传感器 CMOS工艺 误差校准 

分 类 号：TN433[电子电信—微电子学与固体电子学]