热振子式双轴MEMS角速度陀螺敏感机理的研究  

Study on the Sensitivity Mechanism of Thermal Oscillator Type Biaxial MEMS Angular Velocity Gyro

作　　者：朴林华[1] 张严 佟嘉程 李备 PIAO Linhua;ZHANG Yan;TONG Jiacheng;LI Bei(Beijing Key Laboratory for Sensor,Beijing Information Science&Technology University,Beijing 100101,China)

机构地区：[1]北京信息科技大学北京市传感器重点实验室,北京100101

出　　处：《压电与声光》2023年第3期477-483,488,共8页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(61771060);北京市新世纪百千万人才工程培养资助项目(2019A20);北京市自然科学基金&北京市教育委员会联合资助项目(23JD0003);北京市重点实验室开放课题资助项目(2023202209);北京信息科技大学学科与研究生教育校内项目(202305);北京信息科技大学北京市传感器重点实验室资助(202312);现代测控技术教育部重点实验室资助(20232023D)。

摘　　要：该文给出了一种热振子式双轴微机电系统(MEMS)角速度陀螺的敏感机理。在给出双轴敏感原理、热振子的振动模态和陀螺效应的基础上,对敏感结构内的温度场进行了计算。结果表明,开机1.8 s后在敏感结构内形成了一个稳定的温度场;当有角速度加载时,热振子随着输入角速度而移动,造成温度场偏移,两个正交Y(X)方向上对称设置的两热线温差ΔTY(ΔTX)随着输入角速度ax(ay)的加大呈现线性增长,x、y轴平均温度灵敏度为121 mK/(°)/s;根据输入-输出ω_(x)-V_(Yout)和ω_(y)-V_(Xout)特性曲线得到数学模型,从而揭示了敏感机理,x、y轴平均灵敏度为0.091 mV/(°)/s,平均非线性度为1.86%,平均交叉耦合为2.3%。该文为优化结构奠定了实用理论基础。The sensitivity mechanism of a thermal oscillator type biaxial MEMS angular velocity gyro was revealed.The temperature field inside the sensitive structure was calculated on the basis of the biaxial sensitivity principle,the vibration mode of the thermal oscillator and the gyroscopic effect.The results show that:A stable temperature field is formed inside the sensitive structure after 1.8 s of power-on.When there is angular velocity loading,the thermal oscillator moves with the input angular velocity,causing the temperature field to shift,and the temperature differenceΔT Y(ΔT X)S between the two hot lines set symmetrically in the two orthogonal Y(X)directions shows a linear growth with the increase of the input angular velocity a x(a y),and the average temperature sensitivity of x and y axes is 121 mK/(°)/s.According to the input-outputω_(x)-V_(Yout)andω_(y)-V_(Xout)characteristic curves,the mathematical model is obtained and the sensitive mechanism is revealed.The average sensitivity of x and y axes is 0.091 mV/(°)/s,the average nonlinearity is 1.86%,and the average cross-coupling is 2.3%.This paper provides a practical theoretical foundation for the optimized structure.

关 键 词：热振子 微机械 陀螺效应 双轴 交叉耦合 敏感机理 数学模型 

分 类 号：TN385[电子电信—物理电子学] TN96[自动化与计算机技术—检测技术与自动化装置] TP202[自动化与计算机技术—控制科学与工程]