MEMS微热板研究进展  

Research progress of MEMS micro-hotplate

作　　者：沈伟强 杨俊超 马薇 张根伟 杨杰 曹树亚 SHEN Weiqiang;YANG Junchao;MA Wei;ZHANG Genwei;YANG Jie;CAO Shuya(State Key Laboratory of NBC Protection for Civilian,Beijing 102205,China;Suzhou Limu Microelectronics Co Ltd.,Suzhou 215000,China)

机构地区：[1]国民核生化灾害防护国家重点实验室,北京102205 [2]苏州力牧微电子有限公司,江苏苏州215000

出　　处：《传感器与微系统》2023年第7期6-10,共5页Transducer and Microsystem Technologies

基　　金：国家重点研发计划资助项目(2018YFC0809300)。

摘　　要：随着微纳加工技术的不断进步,传感器逐渐向微型化、低功耗、低成本发展。采用微机电系统(MEMS)工艺制备的微热板作为加热和支撑平台,为敏感材料提供稳定的加热温度。因此,微热板的热性能和机械性能是研制过程中重点关注的问题。本文从微热板的基本原理出发,讨论了微热板结构设计和电极几何形状的技术发展,并对微热板国内外研究现状和关键性能参数进行了总结评价。With the continuous progress of micro-nano processing technology,sensors are gradually developing towards miniaturization,low power consumption and low cost.The micro-hotplate prepared based on MEMS process acts as a heating and supporting platform to provide stable heating temperature for sensitive materials.Therefore,the thermal and mechanical properties of the micro-hotplate are the key issues in the development process.Started from basic principle of micro-hotplate,the structural design of micro-hotplate and technological development of geometrical shape of electrode are discussed,and the research status at home and abroad and key performance parameters of the micro-hotplate are summarized and evaluated.

关 键 词：气体传感器 微机电系统 微热板 加热电极 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]