一种高灵敏度在线式MEMS微波功率传感器  

A High Sensitivity On-Line MEMS Microwave Power Sensor

作　　者：金叶 王德波[1] JIN Ye;WANG Debo(School of Elec.and Opt.Engineer.&School of Fler.Elec.(Future Technology),Nanjing University of Postsand Telecommunications,Nanjing 210023,P.R.China)

机构地区：[1]南京邮电大学电子与光学工程学院、柔性电子(未来技术)学院,南京210023

出　　处：《微电子学》2023年第2期304-309,共6页Microelectronics

基　　金：国家青年自然科学基金资助项目(61704086);中国博士后科学基金资助项目(2017M621692);江苏省博士后基金资助项目(1701131B);南京邮电大学国自基金孵化资助项目(NY215139,NY217039)。

摘　　要：为了改善在线式MEMS微波功率传感器的灵敏度特性,设计了一种新型双悬臂梁结构的MEMS微波功率传感器。该结构将测试电极和锚区设计在中心信号线的两侧。建立了双悬臂梁集总电路等效模型,研究了双悬臂梁结构的微波功率传感器的微波特性。构建了枢纽式双悬臂梁静力学模型,研究并分析了新型悬臂梁结构的过载功率与灵敏度。结果表明,相比于测试电极和锚区位于信号线同侧的传统单悬臂梁结构,新型双悬臂梁结构的灵敏度提升了6~8倍。这在一定程度上解决了电容式微波功率传感器检测灵敏度较低的问题。In order to improve the sensitivity characteristics of the on-line MEMS microwave power sensors,a novel type of MEMS microwave power sensor with double cantilever beams was designed.The measured electrodes and the anchors were located on opposite sides of the central signal line in this structure.A lumped equivalent model of double cantilever beam circuit was established,and the microwave characteristics of the double cantilever beam were studied.A pivot-type static model of double cantilever beam was established.The overload power and the sensitivity of this novel cantilever beam structure were theoretically analyzed.The results show that the sensitivity of the novel double cantilever beam structure is 6-8 times higher than that of the traditional single cantilever structure in which the measured electrode and the anchor are located on the same side of the signal line.It solves the disadvantage of the low sensitivity of the capacitive microwave power sensor to a certain extent.

关 键 词：微波功率传感器 电容式 双悬臂梁结构 灵敏度 MEMS 

分 类 号：TN62[电子电信—电路与系统] TP212[自动化与计算机技术—检测技术与自动化装置]