三轴高g值MEMS加速度传感器技术研究  

Research on technology of three-axis high-g MEMS accelerometer

作　　者：盛青山 朱成俊[1,2] 刘立新 段修杰[3] SHENG Qingshan;ZHU Chengjun;LIU Lixin;DUAN Xiujie(School of Mechanical Engineering,Henan Polytechnic Institute,Nanyang Henan 473000,China;Henan Material Forming Equipment Intelligent Technology Engineering Research Center,Nanyang Henan 473000,China;Dengzhou Xingguang Machinery Equipment Co.,Ltd.Nanyang Henan 473000,China)

机构地区：[1]河南工业职业技术学院机械工程学院,河南南阳473000 [2]河南省材料成形装备智能技术工程研究中心,河南南阳473000 [3]邓州星光机械装备有限公司,河南南阳473000

出　　处：《自动化与仪器仪表》2023年第6期224-229,234,共7页Automation & Instrumentation

基　　金：河南省教育厅重点科研项目:MEMS压力传感器及应用技术研究(21B510003);南阳市科技计划项目:MEMS压力传感器及应用技术研究(KJGG022)。

摘　　要：针对检测战斗部侵彻过程中加速度信号,控制战斗部最佳位置起爆的需求,开展三轴高g值MEMS加速度传感器结构设计,工艺参数优化、封装、标定和测试,信号提取与处理等研究,突破传感器敏感元件抗高过载高灵敏度结构设计、关键工艺参数优化、抗高冲击金属封装工艺、标定和测试、冲击信号高信噪比和可靠识别等关键技术,具有重要的研究意义和实用价值。Aiming at the military requirements of detecting the acceleration signal in the process of warhead penetration and con-trolling the optimal position initiation of warhead,carry out research on structural design,process parameter optimization,packaging,calibration and testing,signal extraction and processing of triaxial high g-value MEMS acceleration sensor.This research breaks through the key technologies such as high overload and high sensitivity structure design of sensor sensitive elements,optimization of key process parameters,high impact metal packaging process,calibration and testing,high signal-to-noise ratio and reliable identification of impact signals.This study has important military significance and practical value.

关 键 词：MEMS 三轴加速度传感器 高G值 结构设计 参数优化 封装 标定 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]