电学法热阻测试切换误差评估方法研究  

The Research on Method for Evaluating the Switching Error in Electrical Thermal Resistance Test

作　　者：李灏 刘岩[1] 翟玉卫[1] 丁晨[1] 丁立强[1] 吴爱华[1] LI Hao;LIU Yan;ZHAI Yu-wei;DING Chen;DING Li-qiang;WU Ai-hua(The 13th Research Institute,CETC,Shijiazhuang,Hebei 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《计量学报》2023年第7期1059-1063,共5页Acta Metrologica Sinica

摘　　要：半导体器件电学法热阻测试过程中,电流切换带来的误差是影响测试准确性的重要原因,且该误差目前尚无有效方法评估。在对误差原理分析基础上,设计了“双芯片”测试回路结构避免电流切换,得到不含切换误差的结温参考量值,实现了对仪器测试结果的有效评估。结果显示,该方法能够对热阻测试仪切换过程误差进行定量评估,在热阻测试仪计量方面具有较好的实际意义。During the semiconductor device electrical method thermal resistance testing process,the error caused by current switching is an important factor affecting the accuracy of measurement,which could not be evaluated effectively now.On the basis of error principle analysis,a double-chip circuit was designed to avoid current switching,and a junction temperature reference value without switching error was obtained,achieving effective evaluation of instrument testing results.The results show that this method can quantitatively evaluate the switching process error of thermal resistance testers,and has good practical significance in measuring thermal resistance testers.

关 键 词：计量学 结温测试 电流切换 双芯片回路 

分 类 号：TB94[一般工业技术—计量学] TB973[机械工程—测试计量技术及仪器]