脉冲激光沉积过程虚拟仿真实验设计及教学模式探索  

Design of Virtual Simulation Experiment for Pulsed Laser Deposition Process and Exploration of Its Teaching Mode

作　　者：雷姗[1] 孙立忠[1] 王鑫铭[1] 郭进伟[1] LEI Shan;SUN Lizhong;WANG Xinming;GUO Jinwei(National Demonstration Center for Experimental Material Science and Engineering Education(Xiangtan University),Xiangtan University,Xiangtan 411105,Hunan,China)

机构地区：[1]湘潭大学材料科学与工程国家级实验教学示范中心(湘潭大学),湖南湘潭411105

出　　处：《实验室研究与探索》2023年第5期243-246,共4页Research and Exploration In Laboratory

基　　金：湖南省教育厅科学研究项目一般项目(21C0069);湖南省学位与研究生教育改革研究一般项目资助(2021JGYB080)。

摘　　要：脉冲激光沉积(PLD)薄膜制备技术是物理气相沉积技术中先进的工艺和手段之一,也是材料学科实验教学的重要内容,但该实验所需实验仪器精密、操作复杂、耗材昂贵且用量大,严重制约其有效开展。基于此,自主开发设计了PLD过程虚拟仿真实验项目,完整模拟了PLD薄膜制备的工艺流程及关键控制条件,实现虚实结合。通过线上、线下结合的教学模式,实现沉浸式漫游、互动式学习、自主选择练习,达到激发兴趣、提升能力、提高效率的教学目标,有效培养学生的创新意识。Thin film preparation by pulsed laser deposition(PLD) is one of the most advanced processes and means in physical vapor deposition techniques,and also an important experimental content for students majoring in materials.However,the experimental instrument required is precise,the operation process is complex,and the consumables are costly,which seriously restrictes its rapid development.To address the issues,in this paper,a virtual simulation experiment project of PLD process is independently developed and designed,which completely visualizes the process flow of PLD film preparation and the key control conditions in experimental link,achieves the combination of virtual and real.Through the combination of online and offline teaching mode,we can realize immersive roaming,interactive learning and independent practice,achieving the teaching goals of stimulating interest,enhancing ability and improving efficiency,and effectively cultivating students' innovative consciousness.

关 键 词：脉冲激光沉积 虚拟仿真 实验设计 教学模式 

分 类 号：G434[文化科学—教育学]