基于三维扫描振镜系统音圈电机的离散滑模控制  

Discrete Sliding Mode Control of Voice Coil Motor Based on 3D Scanning Galvanometer System

作　　者：游肖洋 陈光胜[1] 汪雪光 YOU Xiaoyang;CHEN Guangsheng;WANG Xueguang(School of Mechanical Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)

机构地区：[1]上海理工大学机械工程学院,上海200093

出　　处：《重庆工商大学学报（自然科学版）》2023年第4期57-62,共6页Journal of Chongqing Technology and Business University:Natural Science Edition

基　　金：国家重点研发计划(2017YFB1104600).

摘　　要：近20 a来,激光扫描技术被广泛应用于工业加工领域,三维扫描振镜作为一种更高效的激光加工仪器,其核心部件和关键技术主要依靠国外进口。针对国内对三维扫描振镜系统研究较少,且在传统控制方法下,振镜电机普遍存在阶跃响应慢和控制精度低等问题,设计了一种基于新型趋近律与干扰补偿器相结合的离散滑模控制器,该控制方法有效补偿了外部的干扰,具有强鲁棒性。首先,建立基于三维扫描振镜系统的音圈电机线性动力学模型,并对该模型离散化,构建其离散状态空间方程;其次,依据滑模变结构控制理论设计离散系统控制器;最后,通过Simulink搭建控制系统的仿真模型,仿真结果表明:1%和10%的全行程阶跃响应时间分别为2.1 ms和2.4 ms,10%全行程正弦信号位置跟踪的定位精度在3×10^(-4) mm以内,实现了对指令信号的完全跟踪,达到了工程应用要求,为高速三维扫描振镜系统的控制研究提供了新的思路。In the past 20 years,laser scanning technology has been widely used in the field of industrial processing.As a more efficient laser control instrument,3D scanning galvanometer mainly relies on foreign imports for its core components and key technologies.In view of the fact that there are few domestic studies on the 3D scanning galvanometer system,and under the traditional control method,the galvanometer motors generally have problems such as slow step response and low control accuracy,so a discrete sliding mode controller based on the combination of a novel reaching law and a disturbance compensator was designed.This control method effectively compensates for external disturbances and has strong robustness.Firstly,a linear dynamic model of the voice coil motor based on the 3D scanning galvanometer system was established,and the model was discretized to construct its discrete state space equation;secondly,the discrete system controller was designed according to the sliding mode variable structure control theory;finally,the simulation model of the control system was built through Simulink.The simulation results show that the step response times of 1%and 10%of the full stroke were 2.1 ms and 2.4 ms,respectively,and the positioning accuracy of the 10%full-stroke sinusoidal signal position tracking was within 3×10^(-4) mm.It can completely track the command signal,meet the requirements of engineering application,and provide a new idea for the control research of high-speed three-dimensional scanning galvanometer system.

关 键 词：三维扫描振镜 音圈电机 离散滑模控制 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]