电容式MEMS陀螺电极间隙标定方法研究  

Research on Calibration Method of Electrode Gap of Capacitive MEMS Gyroscope

作　　者：刘高 侯占强[1] 邝云斌 肖定邦[1] 吴学忠[1] LIU Gao;HOU Zhanqiang;KUANG Yunbin;XIAO Dingbang;WU Xuezhong(College of Intelligence Science and Technology,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]国防科技大学智能科学学院,湖南长沙410073

出　　处：《压电与声光》2023年第4期499-503,共5页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划基金资助项目(2022YFB3205800)。

摘　　要：该文以蝶翼式陀螺为研究对象,研究了电容式微机电系统(MEMS)陀螺电极间隙标定的方法。提出了一种基于谐振测量的电学标定方法,设计了基于调制解调技术的高精度微弱电容检测电路,并可以通过开关控制实现蝶翼式陀螺不同接口电容电极间隙的测量与标定。基于陀螺工作原理建立了电极间隙理论分析模型,推导了电容间隙与输出电压之间的关系,搭建了电极间隙测量与标定平台,测量了多个陀螺不同电极的间隙,并与采用电容-电压(CV)分析仪、台阶仪的测试结果进行了对比。与CV分析仪测试方法相比,该方法可有效地避免寄生电容的影响,在寄生电容未知的情况下可准确测量出有效电极间隙,同时具有更高的分辨率。与台阶仪测试方法相比,该方法可以准确反映实际电极位置的间隙大小。被测陀螺的电极间隙理论设计值为2μm,采用该文提出的方法测试值分布范围为1.92~2.2μm,采用CV分析仪测试结果为2.004μm(寄生电容已知),采用台阶仪平均测试值为2.11μm。In this paper,the calibration method of electrode gap of capacitive micro-electro-mechanical systems(MEMS)gyroscope with butterfly structure is investigated.An electrical calibration method based on resonance measurement is proposed,a high-precision weak capacitance detection circuit based on modulation and demodulation technology is designed,and the measurement and calibration of electrode gaps of different interface capacitances of the butterfly gyroscope are realized by switch control.The theoretical analysis model of electrode gap is established based on the working principle of gyroscope,the relationship between capacitance gap and output voltage is deduced,the platform for electrode gap measurement and calibration is constructed,and the gaps of different electrodes of several gyroscopes are measured and compared with the test results using CV analyzer and step profile.Compared with the CV analyzer test method,this method can effectively avoid the influence of parasitic capacitance,and the effective electrode gap can be accurately measured when the parasitic capacitance is unknown,and at the same time has a higher resolution.Compared with the step profile test method,this method can accurately reflect the gap size at the actual electrode position.The theoretical design value of the electrode gap of the gyroscope under test is 2.0μm,and the distribution of the test values using the proposed method ranges from 1.92 to 2.2μm,and the average test result using the CV analyzer is 2.004μm(with known parasitic capacitance),while the average test value using the step profile is 2.11μm.

关 键 词：电容式 微机电系统(MEMS)陀螺 谐振测量 电极间隙 标定方法 

分 类 号：TN804[电子电信—信息与通信工程] TN965[自动化与计算机技术—检测技术与自动化装置] TP212.1[自动化与计算机技术—控制科学与工程]