自补偿型双摆式干涉仪的设计  

Design of Self-Compensating Interferometer Based on Pendulum Movable Mirror

作　　者：石磊 孙长库[1] 夏恒新 李岩松 SHI Lei;SUN Changku;XIA Hengxin;LI Yansong(School of Precision Instrument and Opto-electronics Engineering,Tianjin University,Tianjin 300072,China;Tianjin Jie Qiang Equipment ltd.,Tianjin 300400,China)

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]天津捷强动力装备股份有限公司,天津300400

出　　处：《分析测试技术与仪器》2023年第3期304-308,共5页Analysis and Testing Technology and Instruments

基　　金：天津市领军培育项目课题(22YDPYGX00190)。

摘　　要：受自身体积、重量、抗震性能等方面的限制,傅里叶变换红外光谱仪(FTIR)难以在工业现场的应用中取得很好的效果.在充分利用立体角镜与平面折返镜各自光学特性的基础上,设计了一种自补偿型的双摆式干涉仪,在光学原理上解决干涉仪稳定性的问题.通过对扫描机构的电力学分析与建模,建立了控制器与扫描速度之间的关系,并利用高速数字信号处理(DSP)技术实现相应的控制算法,能够将速度误差控制在±0.2%的范围内.通过对仪器性能及标准样品的测试表明,仪器具有较高的信噪比与稳定性,能够满足工业应用的需求.The Fourier transform infrared spectrometer(FTIR)is difficult to achieve good results in industrial field applications due to the limitations of its own volume,weight,and shock resistance.On the basis of fully utilizing the respective optical characteristics of the cube-corner mirror and the planar mirror,a self-compensating double-pendulum interferometer was designed to solve the problem of the stability of the interferometer.Through the electrical analysis and modeling of the scanning mechanism,the relationship between the controller and the scanning speed was established,and the corresponding control algorithm was realized by using high-speed digital signal processing(DSP)technology,which can control the speed error in the range of±0.2%.The test of the instrument performance and the test of the standard sample showed that the instrument has a high signal-to-noise ratio and stability,which can meet the needs of industrial applications.

关 键 词：干涉仪 双摆式动镜 仪器设计 傅里叶变换红外光谱仪 

分 类 号：O657.33[理学—分析化学] TH744.3[理学—化学]