微型化真空泵技术  

Technology Review of Vacuum Micropumps

作　　者：李兴辉[1] 杜婷 韩攀阳 陈海军[1] 蔡军[1] 冯进军[1] LI Xing-hui;DU Ting;HAN Pan-yang;CHEN Hai-jun;CAI Jun;FENG Jin-jun(National Key Laboratory of Science and Technology on Vacuum Electronics,Beijing Vacuum Electronics Research Institute,Beijing 100015,China)

机构地区：[1]中国电子科技集团公司第十二研究所、微波电真空器件国家级重点实验室,北京100015

出　　处：《真空》2023年第4期54-59,共6页Vacuum

基　　金：国家自然科学基金重点项目资助(61831001)。

摘　　要：微型化真空泵对于微机电系统和真空微电子器件的真空封装极具意义。本文从工作原理和工艺实现方面,分析了常见传统真空泵实现微型化的可行性,介绍了膜片泵、射流/扩散泵、努森泵和离子泵的微型化进展,并总结了当前存在的技术障碍。结果表明,目前热点研究的微型化真空泵已经可以构建从大气状态至高真空的真空系统。虽然真空泵微型化后,其性能和工作稳定性相对传统宏观真空泵有较大降低,但具有低功耗、可集成优势,对便携式系统和高真空微系统十分必要。Vacuum micropumps are of great importance for the vacuum packaging of micro-electro-mechanical systems(MEMS)and vacuum microelectronics devices.Based on the operating principle and process realization,the microminiaturization feasibility of common traditional vacuum pumps is analyzed.The developments of vacuum micropumps including membrane pump,Knudsen pump,vapor-jet/diffusion pump and ion sorption pump are introduced,and the technical difficulties are summarized.The results show that although the vacuum micropumps have obvious decrease in exhausting performances and reliabilities compared with their macro predecessors,they are still necessary for the portable and high-vacuum required microsystems with the merits of low-power consumption and ease of integration.

关 键 词：微机电系统 真空微电子器件 真空泵 微封装 微型化 

分 类 号：TN305[电子电信—物理电子学]