微弧氧化和磁控溅射复合膜研究进展  

Research Progress of Composite Coatings Prepared by Micro-arc Oxidation and Magnetron Sputtering

作　　者：安凌云 孟雷超[1] 王钊 康迪菘 舒贵辉 常成功[2,3] AN Lingyun;MENG Leichao;WANG Zhao;KANG Disong;SHU Guihui;CHANG Chenggong(College of Physics and Electronic Information Engineering,Qinghai Nationalities University,Xining 810007,China;Key Laboratory of Comprehensive and Highly Efficient Utilization of Salt Lake Resources,Qinghai Institute of Salt Lake,Chinese Academy of Sciences,Xining 810008,China;Key Laboratory of Salt Lake Resources Chemistry of Qinghai Province,Xining 810008,China)

机构地区：[1]青海民族大学物理与电子信息工程学院,青海西宁810007 [2]中国科学院青海盐湖研究所中国科学院盐湖资源综合高效重点实验室,青海西宁810008 [3]青海省盐湖资源化学重点实验室,青海西宁810008

出　　处：《热加工工艺》2023年第14期6-12,共7页Hot Working Technology

基　　金：青海省自然科学基金项目(2020-ZJ-966Q);青海民族大学高层次人才项目(2021XJG13);青海省“昆仑英才·高端创新创业人才”拔尖人才项目(2020年)。

摘　　要：微弧氧化和磁控溅射均作为较新的表面防护技术,具有一定的优越性,但也不可避免地存有缺点。因此,两技术的复合受到了研究者的关注。介绍了微弧氧化和磁控溅射制备膜层时各自成膜机理以及膜层的特点,着重归纳并总结了两技术结合时制备的复合膜的研究进展,并对其发展趋势进行了展望。Micro-arc oxidation and magnetron sputtering,as relatively novel surface modification technologies,possess lots of advantages,but they also inevitably have shortcomings.Therefore,the combination of the two technologies has attracted the attention of researchers.The formation mechanisms of the coatings prepared separately by micro-arc oxidation and magnetron sputtering,as well as the characteristics of the corresponding coatings were introduced briefly.The research progress of the composite coatings formed via the combination of micro-arc oxidation and the magnetron sputtering was emphatically summarized,and its development trend was prospected.

关 键 词：微弧氧化 磁控溅射 复合膜 微观结构 性能 

分 类 号：TG174[金属学及工艺—金属表面处理]