卫星激光通信快速反射镜研究进展及发展趋势  

Research Progress and Development Trend of Fast Steering Mirror for Satellite Laser Communication

作　　者：余子昊 王栎皓 汪洋[1] 刘艺晨 武震宇 Yu Zihao;Wang Lihao;Wang Yang;Liu Yichen;Wu Zhenyu(State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China;Shanghai IndustrialμTechnology Research Institute,Shanghai 201800,China;School of Microelectronics,Shanghai University,Shanghai 200444,China)

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050 [2]中国科学院大学,北京100049 [3]上海微技术工业研究院,上海201800 [4]上海大学微电子学院,上海200444

出　　处：《激光与光电子学进展》2023年第15期33-42,共10页Laser & Optoelectronics Progress

基　　金：国家重点研发计划(2021YFB3202500);中国科学院科研仪器设备研制项目(YJKYYQ20190026);上海市产业协同创新项目(HCXBCY-2021-044)。

摘　　要：快速反射镜(FSM)具有响应快、精度高、分辨率高等优势,被广泛应用于卫星激光通信、激光武器、自适应光学成像、高精度激光瞄准等领域,是捕获、跟踪和瞄准(ATP)系统中的核心部件。本文介绍了ATP系统和FSM的工作原理,并从驱动方式、FSM的面形、工作带宽、扫描角度范围、控制精度、体积重量及功耗等性能指标及在卫星激光通信的应用等方面,详细介绍了国内外研究机构的多款FSM器件,从音圈电机、压电陶瓷和微机电系统(MEMS)三种驱动结构上对FSM进行了分类,并阐述了不同驱动结构FSM的工作方式及性能差异,分析了影响FSM在ATP系统中应用的关键参数,展望了FSM在激光通信中的关键技术,指出了高精度、数字化、小型化是FSM的发展趋势。As a core component of the acquisition tracking and pointing(ATP)system,the fast steering mirror(FSM)is widely used in satellite laser communication,laser weapons,adaptive optics imaging,high-precision laser aiming,and other applications because of its fast response,high accuracy,and high resolution.This paper presents the working principles of the FSM and ATP system.Various FSM devices of global research institutions are reviewed based on several parameters,such as driving mode,FSM figure,working bandwidth,range of scan angle,control precision,volume,weight,power consumption,and applications in satellite laser communication.Three main classes of FSMs[the voice coil motor,piezoelectric ceramics,and micro-electro-mechanical system(MEMS)]are elaborated.The operating mode and performance difference of FSMs with different driving structures are described,and the critical parameters for applying FSM in the ATP system are analyzed.The key technologies of FSM in laser communication are prospected.It is concluded that high precision,digitalization,and miniaturization are the future trends of FSM.

关 键 词：光通信 卫星激光通信 快速反射镜 压电陶瓷 音圈电机 微机电系统 

分 类 号：TN209[电子电信—物理电子学]