基于空间网格的三维激光球杆仪系统误差标定  

System Error Calibration of 3D Laser Ball Bar Based on Space Grid

作　　者：陈天赐 张记云 鄂云亮 范光照 钱钧 娄志峰[1] CHEN Tianci;ZHANG Jiyun;E Yunliang;FAN Guangzhao;QIAN Jun;LOU Zhifeng(School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China;Dalian University of Technology Gaoyou Research Institute Co.,Ltd,Gaoyou 225600,China)

机构地区：[1]大连理工大学机械工程学院,辽宁大连116024 [2]大连理工高邮研究院有限公司,江苏高邮225600

出　　处：《仪表技术与传感器》2023年第9期46-51,共6页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(52275521);江苏省政策引导类计划项目(BZ2020051)。

摘　　要：三维激光球杆仪是一种空间坐标测量设备,由二维转台和径向伸缩机构组成。伸缩机构的末端固定有一个由测量目标磁吸并带动设备运动的标准球。伸缩机构的位移由光栅尺测量,二维转台的旋转角度由圆光栅测量,测量系统测得的坐标经坐标转换后可以得出被测目标的坐标。分析了系统的主要误差来源,采用多体系统误差建模方法建立了误差模型。最后基于几何误差模型非线性优化对设备的单项误差进行标定。经过误差补偿后,设备在测量范围内测量空间点的位置误差可以达到0.06 mm以内。3D laser ball bar is a self-developed space coordinate measuring device,which consists of a two-dimensional rotary stage and a radial telescopic mechanism.The end of the telescopic mechanism is fixed with a standard ball which is magnetically attracted by the measurement target and drives the equipment to move.The displacement of the telescopic mechanism was measured by a grating ruler,and the rotation angle of the two-dimensional rotary stage was measured by a circular grating.The coordinates measured by the measurement system can be converted to obtain the coordinates of the measured target.The main error sources of the system were analyzed,and the error model was established by using the multi-body system error modeling method.Finally,the single error of the equipment was calibrated based on the nonlinear optimization of the geometric error model.After error compensation,the position error of the equipment measuring space points within the measurement range can reach within 0.06 mm.

关 键 词：三维激光球杆仪 误差建模 参数标定 误差补偿 

分 类 号：TH721[机械工程—仪器科学与技术]