MEMS压力传感器压力漂移故障研究与改进  

Research and Improvement of MEMS Pressure Sensor Pressure Drift Fault

作　　者：马金强 王雅南 郝学信 Ma Jin-qiang;Wang Ya-nan;Hao Xue-xin(Ningbo Geely Royal Engine Components Co.,Ltd,Zhejiang Ningbo 315336)

机构地区：[1]宁波吉利罗佑发动机零部件有限公司,浙江宁波315336

出　　处：《内燃机与配件》2023年第19期46-48,共3页Internal Combustion Engine & Parts

摘　　要：压力传感器是汽油机电子控制系统的重要部件,为汽油机电子控制单元提供关键的压力信号,如果压力信号出现漂移,将会影响汽油机测量精度和故障诊断。本文针对某汽油机MEMS压力传感器出现批量压力信号漂移的故障,将压力传感器进行拆解分析,分别从结构型式、工作原理和生产工艺三个方面进行研究,对压力信号漂移原因进行逐一排查,最终找到根本原因:由于晶圆在热氧化过程中温度控制缺陷导致压敏电阻氮化绝缘层厚度不足,造成电流泄漏。提出改进方案,通过减小晶圆烤炉温度公差,有效解决了压力漂移故障。Pressure sensor is an important part of the electronic control system of gasoline engine,which provides the key pressure signal for the electronic control unit of gasoline engine.If the pressure signal drifts,it will affect the measurement accuracy and fault diagnosis of gasoline engine.Aiming at the failure of batch pressure signal drift of a MEMS pressure sensor of a gasoline engine,this paper disassembled and analyzed the pressure sensor,studied from three aspects:structure type,working principle and production process,investigated the causes of pressure signal drift one by one,and finally found the root cause:due to the defect of temperature control in the thermal oxidation process of wafer,the thickness of varistor nitriding insulation layer is insufficient,resulting in current leakage.An improved scheme is proposed to effectively solve the pressure drift fault by reducing the temperature tolerance of the wafer oven.

关 键 词：MEMS 漂移 压敏电阻 晶圆 烤炉 

分 类 号：TK418[动力工程及工程热物理—动力机械及工程]